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Viscous fluid damping in a laterally oscillating finger of a comb-drive micro-resonator based on micro-polar fluid theory
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作者 sahra azma Ghader Rezazadeh +1 位作者 Rasoul Shabani Elnaz Alizadeh-Haghighi 《Acta Mechanica Sinica》 SCIE EI CAS CSCD 2016年第3期397-405,共9页
Viscous damping is a dominant source of energy dissipation in laterally oscillating micro-structures. In microresonators in which the characteristic dimensions are comparable to the dimensions of the fluid molecules, ... Viscous damping is a dominant source of energy dissipation in laterally oscillating micro-structures. In microresonators in which the characteristic dimensions are comparable to the dimensions of the fluid molecules, the assumption of the continuum fluid theory is no longer justified and the use of micro-polar fluid theory is indispensable. In this paper a mathematical model was presented in order to predict the viscous fluid damping in a laterally oscillating finger of a micro-resonator considering micro-polar fluid theory. The coupled governing partial differential equations of motion for the vibration of the finger and the micro-polar fluid field have been derived. Considering spin and no-spin boundary conditions, the related shape functions for the fluid field were presented. The obtained governing differential equations with time varying boundary conditions have been transformed to an enhanced form with homogenous boundary conditions and have been discretized using a Galerkin-based reduced order model. The effects of physical properties of the micro-polar fluid and geometrical parameters of the oscillating structure on the damping ratio of the system have been investigated. 展开更多
关键词 Micro-electro-mechanical systems(MEMS) Micro-resonator Micro-polar theory Viscous fluid damping Galerkin method
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