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Superhard Nanocomposite Coatings
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作者 samzhang DeenSUN 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2002年第6期485-491,共7页
The recent development in the field of nanocomposite coatings with good mechanical properties is critically reviewed in this paper. The design principle and materials selection for the nanocomposite coatings are intro... The recent development in the field of nanocomposite coatings with good mechanical properties is critically reviewed in this paper. The design principle and materials selection for the nanocomposite coatings are introduced. Different methods for the preparation of superhard nanocomposite coatings are described with emphasis on the magnetron sputtering. Based on recent theoretical and experimental results regarding the appearance of superhardness in nanocomposite coating, lattice parameter changes, crystallite size, microstructure and morphology are reviewed in detail. Also emphasized are the mechanical properties (especially on hardness) and the ways by which the properties are derived. 展开更多
关键词 SUPERHARD NANOCOMPOSITE COATING
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物理汽相淀积薄膜的微结构和内应力 被引量:8
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作者 朱贤方 J.S.Wiliams +2 位作者 L.C.Lim samzhang 吴自勤 《物理》 CAS 1998年第1期37-40,47,共5页
文章综述的内容为:(1)物理汽相淀积(PVD)薄膜的微结构;(2)PVD薄膜的内应力;(3)膜的微结构和内应力的关系.着重介绍制备参数对微结构、内应力和两者之间的主要联系的影响.
关键词 PVD薄膜 微结构 内应力 薄膜制备
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