Processing of materials by ultrashort laser pulses has evolved significantly over the last decade and is starting to reveal its scientific,technological and industrial potential.In ultrafast laser manufacturing,optica...Processing of materials by ultrashort laser pulses has evolved significantly over the last decade and is starting to reveal its scientific,technological and industrial potential.In ultrafast laser manufacturing,optical energy of tightly focused femtosecond or picosecond laser pulses can be delivered to precisely defined positions in the bulk of materials via two-/multi-photon excitation on a timescale much faster than thermal energy exchange between photoexcited electrons and lattice ions.Control of photoionization and thermal processes with the highest precision,inducing local photomodification in sub-100-nm-sized regions has been achieved.State-of-the-art ultrashort laser processing techniques exploit high 0.1–1μm spatial resolution and almost unrestricted three-dimensional structuring capability.Adjustable pulse duration,spatiotemporal chirp,phase front tilt and polarization allow control of photomodification via uniquely wide parameter space.Mature opto-electrical/mechanical technologies have enabled laser processing speeds approaching meters-per-second,leading to a fast lab-to-fab transfer.The key aspects and latest achievements are reviewed with an emphasis on the fundamental relation between spatial resolution and total fabrication throughput.Emerging biomedical applications implementing micrometer feature precision over centimeter-scale scaffolds and photonic wire bonding in telecommunications are highlighted.展开更多
A line-shaped beam is useful for increasing the processing speed in laser grooving and scribing.In laser grooving,depth control of the processed structure is important for performing precise processing.In this paper,i...A line-shaped beam is useful for increasing the processing speed in laser grooving and scribing.In laser grooving,depth control of the processed structure is important for performing precise processing.In this paper,in-process monitoring of the depth of a structure formed by femtosecond laser processing with a line-shaped beam using swept-source optical coherence tomography(SS-OCT)was demonstrated.In the evaluation of the SS-OCT system,the depth resolution,measurement accuracy,and axial measurable range were 15.8μm,±2.5μm and 5.3 mm,respectively.In laser grooving,the structural shape and the distribution of deposited debris were successfully monitored.The measured depth agreed well with the depth obtained using a laser confocal microscope.The proposed method will be effective for precise laser processing with feedback control of the laser parameters based on in-process monitoring of the processed structure.展开更多
基金support by a project‘ReSoft’(SEN-13/2015)from the Research Council of Lithuaniasupport by JSPS Kakenhi Grant No.15K04637+1 种基金support via ARC Discovery DP120102980Gintas Šlekys for the partnership project with Altechna Ltd on industrial fs-laser fabrication.
文摘Processing of materials by ultrashort laser pulses has evolved significantly over the last decade and is starting to reveal its scientific,technological and industrial potential.In ultrafast laser manufacturing,optical energy of tightly focused femtosecond or picosecond laser pulses can be delivered to precisely defined positions in the bulk of materials via two-/multi-photon excitation on a timescale much faster than thermal energy exchange between photoexcited electrons and lattice ions.Control of photoionization and thermal processes with the highest precision,inducing local photomodification in sub-100-nm-sized regions has been achieved.State-of-the-art ultrashort laser processing techniques exploit high 0.1–1μm spatial resolution and almost unrestricted three-dimensional structuring capability.Adjustable pulse duration,spatiotemporal chirp,phase front tilt and polarization allow control of photomodification via uniquely wide parameter space.Mature opto-electrical/mechanical technologies have enabled laser processing speeds approaching meters-per-second,leading to a fast lab-to-fab transfer.The key aspects and latest achievements are reviewed with an emphasis on the fundamental relation between spatial resolution and total fabrication throughput.Emerging biomedical applications implementing micrometer feature precision over centimeter-scale scaffolds and photonic wire bonding in telecommunications are highlighted.
基金This work was supported by JSPS KAKENHI Grant Number JP18K14142was performed for the Council for Science,Technology and Innovation(CSTI),Cross-ministerial Strategic Innovation Promotion Program(SIP),“Photonics and Quantum Technology for Society 5.0”(Funding agency:QST).
文摘A line-shaped beam is useful for increasing the processing speed in laser grooving and scribing.In laser grooving,depth control of the processed structure is important for performing precise processing.In this paper,in-process monitoring of the depth of a structure formed by femtosecond laser processing with a line-shaped beam using swept-source optical coherence tomography(SS-OCT)was demonstrated.In the evaluation of the SS-OCT system,the depth resolution,measurement accuracy,and axial measurable range were 15.8μm,±2.5μm and 5.3 mm,respectively.In laser grooving,the structural shape and the distribution of deposited debris were successfully monitored.The measured depth agreed well with the depth obtained using a laser confocal microscope.The proposed method will be effective for precise laser processing with feedback control of the laser parameters based on in-process monitoring of the processed structure.
