The humidity sensitive characteristics of the sensor fabricated from Ce-doped nanoporous ZnO by screen-printing on the alumina substrate with Ag-Pd interdigital electrodes were investigated at different sintering temp...The humidity sensitive characteristics of the sensor fabricated from Ce-doped nanoporous ZnO by screen-printing on the alumina substrate with Ag-Pd interdigital electrodes were investigated at different sintering temperatures.The nanoporous thin films were prepared by sol-gel technique.It was found that the impedance of the sensor sintered at 600 oC changed more than four order of magnitude in the relative humidity（RH） range of 11%-95% at 25 oC.The response and recovery time of the sensor were about 13 and 17 s,respectively.The sensor showed high humidity sensitivity,rapid response and recovery,prominent stability,good repeatability and narrow hysteresis loop.These re-sults indicated that Ce-doped nanoporous ZnO thin films can be used in fabricating high-performance humidity sensors.展开更多
文摘The humidity sensitive characteristics of the sensor fabricated from Ce-doped nanoporous ZnO by screen-printing on the alumina substrate with Ag-Pd interdigital electrodes were investigated at different sintering temperatures.The nanoporous thin films were prepared by sol-gel technique.It was found that the impedance of the sensor sintered at 600 oC changed more than four order of magnitude in the relative humidity（RH） range of 11%-95% at 25 oC.The response and recovery time of the sensor were about 13 and 17 s,respectively.The sensor showed high humidity sensitivity,rapid response and recovery,prominent stability,good repeatability and narrow hysteresis loop.These re-sults indicated that Ce-doped nanoporous ZnO thin films can be used in fabricating high-performance humidity sensors.
