Multiple quantum well spatial light modulators with 128×128 array in 38μm pitch are fabricated using two pproaches, one with an attachment of an optical substrate and another one without. These two fabrication p...Multiple quantum well spatial light modulators with 128×128 array in 38μm pitch are fabricated using two pproaches, one with an attachment of an optical substrate and another one without. These two fabrication processes are described and compared.展开更多
文摘Multiple quantum well spatial light modulators with 128×128 array in 38μm pitch are fabricated using two pproaches, one with an attachment of an optical substrate and another one without. These two fabrication processes are described and compared.
