Dwell time plays a vital role in determining the accuracy and convergence of the computer-controlled optical surfacing process.However,optimizing dwell time presents a challenge due to its ill-posed nature,resulting i...Dwell time plays a vital role in determining the accuracy and convergence of the computer-controlled optical surfacing process.However,optimizing dwell time presents a challenge due to its ill-posed nature,resulting in non-unique solutions.To address this issue,several well-known methods have emerged,including the iterative,Bayesian,Fourier transform,and matrix-form methods.Despite their independent development,these methods share common objectives,such as minimizing residual errors,ensuring dwell time's positivity and smoothness,minimizing total processing time,and enabling flexible dwell positions.This paper aims to comprehensively review the existing dwell time optimization methods,explore their interrelationships,provide insights for their effective implementations,evaluate their performances,and ultimately propose a unified dwell time optimization methodology.展开更多
Optics with high-precision height and slope are increasingly desired in numerous industrial fields.For instance,Kirkpatrick-Baez(KB)mirrors play an important role in synchrotron X-ray applications.A KB system is compo...Optics with high-precision height and slope are increasingly desired in numerous industrial fields.For instance,Kirkpatrick-Baez(KB)mirrors play an important role in synchrotron X-ray applications.A KB system is composed of two aspherical,grazing-incidence mirrors used to focus an X-ray beam.The fabrication of KB mirrors is challenging due to the aspherical departure of the mirror surfaces from base geometries and the high-quality requirements for slope and height residuals.In this paper,we present the process of manufacturing an elliptical cylinder KB mirror using our in-house-developed ion beam figuring(IBF)and metrology technologies.First,the key aspects of figuring and finishing processes with IBF are illustrated in detail.The effect of positioning error on the convergence of the residual slope error is highlighted and compensated.Finally,inspection and cross-validation using different metrology instruments are performed and used as the final validation of the mirror.Results confirm that relative to the requested off-axis ellipse,the mirror has achieved 0.15-μrad root mean square(RMS)and 0.36-nm RMS residual slope and height errors,respectively,while maintaining the initial 0.3-nm RMS microroughness.展开更多
基金supported by the Accelerator and Detector Research Program,part of the Scientific User Facility Division of the Basic Energy Science Office of the U.S.Department of Energy(DOE),under the Field Work Proposal No.FWP-PS032This research was performed at the Optical Metrology Laboratory at the National Synchrotron Light Source II,a U.S.DOE Office of Science User Facility operated by Brookhaven National Laboratory(BNL)under Contract No.DE-SC0012704This work was performed under the BNL LDRD 17-016“Diffraction limited and wavefront preserving reflective optics development.”This work was also supported by the Natural Science Foundation of Fujian Province,China,under grant number 2022J011245.
文摘Dwell time plays a vital role in determining the accuracy and convergence of the computer-controlled optical surfacing process.However,optimizing dwell time presents a challenge due to its ill-posed nature,resulting in non-unique solutions.To address this issue,several well-known methods have emerged,including the iterative,Bayesian,Fourier transform,and matrix-form methods.Despite their independent development,these methods share common objectives,such as minimizing residual errors,ensuring dwell time's positivity and smoothness,minimizing total processing time,and enabling flexible dwell positions.This paper aims to comprehensively review the existing dwell time optimization methods,explore their interrelationships,provide insights for their effective implementations,evaluate their performances,and ultimately propose a unified dwell time optimization methodology.
基金This work was supported by the Accelerator and Detector Research Program,part of the Scientific User Facility Division of the Basic Energy Science Office of the US Department of Energy(DOE),under the Field Work Proposal No.PS032This research was performed at the Optical Metrology Laboratory at the National Synchrotron Light Source II,a US DOE Office of Science User Facility operated for the DOE Office of Science by Brookhaven National Laboratory(BNL)under Contract No.DE-SC0012704This work was performed under the BNL LDRD 17-016‘Diffraction limited and wavefront preserving reflective optics development’.
文摘Optics with high-precision height and slope are increasingly desired in numerous industrial fields.For instance,Kirkpatrick-Baez(KB)mirrors play an important role in synchrotron X-ray applications.A KB system is composed of two aspherical,grazing-incidence mirrors used to focus an X-ray beam.The fabrication of KB mirrors is challenging due to the aspherical departure of the mirror surfaces from base geometries and the high-quality requirements for slope and height residuals.In this paper,we present the process of manufacturing an elliptical cylinder KB mirror using our in-house-developed ion beam figuring(IBF)and metrology technologies.First,the key aspects of figuring and finishing processes with IBF are illustrated in detail.The effect of positioning error on the convergence of the residual slope error is highlighted and compensated.Finally,inspection and cross-validation using different metrology instruments are performed and used as the final validation of the mirror.Results confirm that relative to the requested off-axis ellipse,the mirror has achieved 0.15-μrad root mean square(RMS)and 0.36-nm RMS residual slope and height errors,respectively,while maintaining the initial 0.3-nm RMS microroughness.
