This letter presents a polarimetric interferometer （PI） that can measure the ellipsometric parameter θ with an accuracy of 0.01° leading to a potential accuracy of 17 pm. The PI is constructed and compared wit...This letter presents a polarimetric interferometer （PI） that can measure the ellipsometric parameter θ with an accuracy of 0.01° leading to a potential accuracy of 17 pm. The PI is constructed and compared with a commercial heterodyne interferometer （HI）. Given its low nonlinearity, the PI is used to measure the residual nonlinearity of a heterodyne interferometric displacement system. A rotating half wave plate is used to compensate for a part of the nonlinearity error caused by the misalignment of the axis between input polarizing states and beamsplitter.展开更多
基金supported by the National Natural Science Foundation of China (Nos. 51105348and 51075377)the Scientific Research Foundation for the Returned Overseas Chinese Scholars,State Education Ministry
文摘This letter presents a polarimetric interferometer （PI） that can measure the ellipsometric parameter θ with an accuracy of 0.01° leading to a potential accuracy of 17 pm. The PI is constructed and compared with a commercial heterodyne interferometer （HI）. Given its low nonlinearity, the PI is used to measure the residual nonlinearity of a heterodyne interferometric displacement system. A rotating half wave plate is used to compensate for a part of the nonlinearity error caused by the misalignment of the axis between input polarizing states and beamsplitter.
