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Space Charge Effects in CSL Gauge——with previously assumed charge distribution
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作者 t.kanaji T.Urano S.Hongo 《真空科学与技术学报》 EI CAS CSCD 1992年第Z1期83-86,共4页
The "cascade static lens (CSL) gauge" has a high sensitivity(S) because the emitted electrons repeat the go and back oscillation before they are received by the electrodes. (S=18.6 Pa<sup>-1</su... The "cascade static lens (CSL) gauge" has a high sensitivity(S) because the emitted electrons repeat the go and back oscillation before they are received by the electrodes. (S=18.6 Pa<sup>-1</sup> (2480 Torr<sup>-1</sup> in a 展开更多
关键词 CSL with previously assumed charge distribution Space Charge Effects in CSL Gauge
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