This letter addresses several key issues in the process of model-based optical metrology, including three dimensional (3D) sensing, calibration, registration and fusion of range images, geometric representation, and v...This letter addresses several key issues in the process of model-based optical metrology, including three dimensional (3D) sensing, calibration, registration and fusion of range images, geometric representation, and visualization of reconstructed 3D model by taking into account the shape measurement of 3D complex structures,and some experimental results are presented.展开更多
基金This work is supported by National Natural Science Foundationof China.(Grant No. 60275012)Natural Science Research Foundof Higher Education in Guangdong Province (Grant No. 04Z010)+1 种基金the Natural Science Foundation of Guangdong Province (GranNo. 06028584) the Research Project of Science & Technol-ogy from Shenzhen Government (Grant No.200619).
文摘This letter addresses several key issues in the process of model-based optical metrology, including three dimensional (3D) sensing, calibration, registration and fusion of range images, geometric representation, and visualization of reconstructed 3D model by taking into account the shape measurement of 3D complex structures,and some experimental results are presented.
