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Study of TiO_2 thin films on Si substrate by the photoacoustic elastic bending method
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作者 todorovi dragan m RABASOVI mihailo D +2 位作者 mARKUSHEV dragan D FRANKO mladen TANGAR Urka Lavreni 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS 2013年第7期1285-1293,共9页
The quantitative photoacoustic investigation of different TiO2 thin films on Si substrates is presented using the elastic bending method. Photoacoustic signal amplitude and phase spectra versus modulation frequency we... The quantitative photoacoustic investigation of different TiO2 thin films on Si substrates is presented using the elastic bending method. Photoacoustic signal amplitude and phase spectra versus modulation frequency were measured and analyzed using different sample thicknesses. Within the proposed method particular attention is given to the analysis of optical, thermal, elastic and structural sample parameters. Considerable focus is devoted to the fitting procedure of experimental results using the two-layer sample theoretical model. Characteristics of previously developed photoacoustic apparatus are discussed, attempting to search the ideal experimental conditions which can provide a good signal-to-noise ratio and sensitivity. 展开更多
关键词 PHOTOACOUSTIC TIO2 thin films
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