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EUV Optical Design -Reflective and Diffractive Optics 被引量:1
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作者 takeshi namioka (tohoku university, japan) 《光学精密工程》 EI CAS CSCD 2001年第5期411-417,共7页
This article describes the task of optical designers to achieve a better design. This is followed by some discussions on the necessity of total design that takes all the elements into account from its light source to ... This article describes the task of optical designers to achieve a better design. This is followed by some discussions on the necessity of total design that takes all the elements into account from its light source to the final image plane. Methods are given to simulate rays from a bending magnet and an undulator, surface figure errors, and thermal deformations. Some examples are given for an undulator beamline and an EUVL optical system, together with tolerance estimates of the figure error and thermal deformation. 展开更多
关键词 OPTICAL DESIGN RAY-TRACING OPTICAL SYSTEMS
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