The qualitative and quantitative assessment of gas flow has become increasingly relevant in the use of everyday systems. The micro flow sensor, developed by Innovative Sensor Technology AG （Switzerland）, is by princ...The qualitative and quantitative assessment of gas flow has become increasingly relevant in the use of everyday systems. The micro flow sensor, developed by Innovative Sensor Technology AG （Switzerland）, is by principle a calorimetric flow sensor produced as a micro system on a glass substrate by means of photolithography and glass etching technology. These structures are arranged as a platinum micro heater and sensor in a Wheatstone bridge. The subsequent etching process produces an exposed area of polyimide membrane that is only a few microns thick and includes the resistive sensor structure as the active area. In addition, the RTD （resistance temperature detector） technology included on the sensor allows for the implementation of a variety of electronic biasing and signal processing modes. Since the sensor can be powered and the bridge can be measured in both CTA （constant temperature anemometer） and calorimetric mode, new possibilities are presented for both low and high flow rates with regard to temperature compensation, self-calibration and self-monitoring.展开更多
文摘The qualitative and quantitative assessment of gas flow has become increasingly relevant in the use of everyday systems. The micro flow sensor, developed by Innovative Sensor Technology AG （Switzerland）, is by principle a calorimetric flow sensor produced as a micro system on a glass substrate by means of photolithography and glass etching technology. These structures are arranged as a platinum micro heater and sensor in a Wheatstone bridge. The subsequent etching process produces an exposed area of polyimide membrane that is only a few microns thick and includes the resistive sensor structure as the active area. In addition, the RTD （resistance temperature detector） technology included on the sensor allows for the implementation of a variety of electronic biasing and signal processing modes. Since the sensor can be powered and the bridge can be measured in both CTA （constant temperature anemometer） and calorimetric mode, new possibilities are presented for both low and high flow rates with regard to temperature compensation, self-calibration and self-monitoring.
