Different bactericidal abilities of plasma-activated saline with various reactive species prepared by surface plasma-activated air and plasma jet combinations

Plasma-activated water(PAW),as an extended form of cold atmospheric-pressure plasma,greatly expands the application of plasma-based technology.The biological effects of PAW are closely related to the aqueous reactive species,which can be regulated by the activation process.In this study,surface plasma-activated air(SAA)and a He+O_(2)plasma jet(Jet)were parallelly combined(the SAA+Jet combination)or sequentially combined(the SAA→Jet combination and the Jet→SAA combination)to prepare plasma-activated saline(PAS).The PAS activated by the combinations exhibited stronger bactericidal effects than that activated by the SAA or the Jet alone.The concentrations of H_(2)O_(2)and NO_(2)^(-)were higher in the PAS activated by the Jet→SAA combination,while ONOO^(-)concentrations were close in the three kinds of PAS and^(1)O_(2)concentrations were higher in the PAS activated by the SAA+Jet combination.The analysis of scavengers also demonstrated that H_(2)O_(2),^(1)O_(2),and ONOO^(-)in the PAS activated by the SAA+Jet combination,and^(1)O_(2)in the PAS activated by the Jet→SAA combination played critical roles in bactericidal effects.Further,the effective placement time of the three PAS varied,and the PAS activated by the Jet→SAA combination could also inactivate 2.6-log_(10)of MRSA cells after placement for more than 60 min.The regulation of reactive species in plasma-activated water via different combinations of plasma devices could improve the directional application of plasma-activated water in the biomedical field.

An Innovative Method to Improve Model Accuracy by Implementing Multi-models Scheme for 28nm Node and Below

As the process comes into 28nm node and below,lithography struggles stronger between high resolution (high NA) and enough process window especially for hole layers (Contacts and Vias).Taking more care of process window may result in lower image quality of structures and bigger uncertainty in OPC model accuracy.Besides,it is difficult to cover all kinds of test structures within acceptable accuracy in one OPC model because of distinct difference of image quality of different patterns.To solve these problems,this paper introduces an innovative method of applying multi-models in one layer OPC.According to different characteristic features,multiple models are applied respectively and the fitting on these features with poor resolution can be improved by re-optimizing based on related model.A practice for 28 nm Via layer modeling calibration is given,and it shows an evident improvement of model accuracy through the implementing of multiple models scheme.