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A shoe-box-sized 3D laser nanoprinter based on two-step absorption
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作者 tobias messer Michael Hippe +1 位作者 Jingya(Lilyn)Gao Martin Wegener 《Light(Advanced Manufacturing)》 2024年第2期115-122,共8页
State-of-the-art commercially available 3D laser micro-and nanoprinters using polymeric photoresists based on two-or multi-photon absorption rely on high-power pico-or femtosecond lasers,leading to fairly large and ex... State-of-the-art commercially available 3D laser micro-and nanoprinters using polymeric photoresists based on two-or multi-photon absorption rely on high-power pico-or femtosecond lasers,leading to fairly large and expensive instruments.Lately,we have introduced photoresists based on two-step absorption instead of two-photon absorption,allowing for the use of small and inexpensive continuous-wave 405 nm wavelength GaN semiconductor laser diodes with light-output powers below 1 mW.Here,using the identical photoresist system and similar laser diodes,we report on the design,construction,and characterization of a 3D laser nanoprinter that fits into a shoe box.This shoe box contains all optical components,namely the mounted laser,the collimation-and beam-shaping optics,a miniature MEMS xy-scanner,a tube lens,the focusing microscope objective lens(NA=1.4,100×magnification),a piezo slip-stick z-stage,the sample holder,a camera monitoring system,LED sample illumination,as well as the miniaturized control electronics employing a microcontroller.We present a gallery of example 3D structures printed with this instrument.We achieve about 100 nm lateral spatial resolution and focus scan speeds of about 1 mm/s.Potentially,our shoe-box-sized system can be made orders of magnitude less expensive than today’s commercial systems. 展开更多
关键词 Two-step absorption Direct laser writing 3D laser nanoprinters Micro-electro-mechanical-systems scanner 3D nanostructures
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