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Picosecond burst pulse machining with temporal energy modulation [Invited] 被引量:2
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作者 Akinao Nakamura tomoki mizuta +4 位作者 Yasuhiko Shimotsuma Masaaki Sakakura Tomohito Otobe Masahiro Shimizu Kiyotaka Miura 《Chinese Optics Letters》 SCIE EI CAS CSCD 2020年第12期83-87,共5页
Suppression of stress and crack generation during picosecond laser processing in transparent brittle materials such as glass was successfully demonstrated by a picosecond laser pulse with temporal energy modulation.Th... Suppression of stress and crack generation during picosecond laser processing in transparent brittle materials such as glass was successfully demonstrated by a picosecond laser pulse with temporal energy modulation.The origin of deterioration in processing accuracy could be interpreted in terms of the discontinuous movement of plasma in the vicinity of the focus.To reveal the effectiveness of the temporal energy modulation for smootli machining,such plasma motion was simulated by the fiidtc-d ifference time-domain method.F urt her more,photoinduced birefringence was observed using a high-speed polarization camera. 展开更多
关键词 picosecond laser energy modulation burst pulse material processing stress distribution
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