The size reduction of tunable micromachined filters is carried out for high-speed wavelength tuning. We fabricated micromachined filters having a miniature structure with an air gap of 300 run and a short cantilever o...The size reduction of tunable micromachined filters is carried out for high-speed wavelength tuning. We fabricated micromachined filters having a miniature structure with an air gap of 300 run and a short cantilever of 45 urn, exhibiting fast response of below 3 us.展开更多
文摘The size reduction of tunable micromachined filters is carried out for high-speed wavelength tuning. We fabricated micromachined filters having a miniature structure with an air gap of 300 run and a short cantilever of 45 urn, exhibiting fast response of below 3 us.
