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New Bi-metallic Single Source Precursors for the Deposition of Thin Films of Semiconductor Ceramics
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作者 u.salma M.Mazhar +1 位作者 J.I.Akhter Z.Ali 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2007年第2期196-200,共5页
Stable binary single source precursors (SSP) for the deposition of thin films of ceramic semiconductors of composition SnO·GeO were synthesized by close circuit chemical vapour deposition (CCCVD) method. Elem... Stable binary single source precursors (SSP) for the deposition of thin films of ceramic semiconductors of composition SnO·GeO were synthesized by close circuit chemical vapour deposition (CCCVD) method. Elemental analysis and spectroscopic techniques were used to characterize the precursors. Scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) were employed to characterize the thin films. Resistivity measurements were conducted to show that the films are of semiconducting nature. 展开更多
关键词 Single source precursors CCCVD Organotin carboxylates
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