We show the structural and optical properties of non-polar a-plane GaN epitaxial films modified by Si ion implantation.Upon gradually raising Si fluences from 5×10^(13)cm^(-2)to 5×10^(15)cm^(-2),the n-type d...We show the structural and optical properties of non-polar a-plane GaN epitaxial films modified by Si ion implantation.Upon gradually raising Si fluences from 5×10^(13)cm^(-2)to 5×10^(15)cm^(-2),the n-type dopant concentration gradually increases from 4.6×10^(18)cm^(-2)to 4.5×10^(20)cm^(-2),while the generated vacancy density accordingly raises from 3.7×10^(13)cm^(-2)to 3.8×10^(15)cm^(-2).Moreover,despite that the implantation enhances structural disorder,the epitaxial structure of the implanted region is still well preserved which is confirmed by Rutherford backscattering channeling spectrometry measurements.The monotonical uniaxial lattice expansion along the a direction(out-of-plane direction)is observed as a function of fluences till 1×10^(15)cm^(-2),which ceases at the overdose of 5×10^(15)cm^(-2)due to the partial amorphization in the surface region.Upon raising irradiation dose,a yellow emission in the as-grown sample is gradually quenched,probably due to the irradiation-induced generation of non-radiative recombination centers.展开更多
基金the Key-Area Research and Development Program of Guangdong Province,China(Grant Nos.2019B010132001,2020B010174003,and 2019B121204004)the Basic and Application Basic Research Foundation of Guangdong Province,China(Grant Nos.2020A1515110891 and 2019A1515111053)the Fund from the Ion Beam Center(IBC)at HZDR.
文摘We show the structural and optical properties of non-polar a-plane GaN epitaxial films modified by Si ion implantation.Upon gradually raising Si fluences from 5×10^(13)cm^(-2)to 5×10^(15)cm^(-2),the n-type dopant concentration gradually increases from 4.6×10^(18)cm^(-2)to 4.5×10^(20)cm^(-2),while the generated vacancy density accordingly raises from 3.7×10^(13)cm^(-2)to 3.8×10^(15)cm^(-2).Moreover,despite that the implantation enhances structural disorder,the epitaxial structure of the implanted region is still well preserved which is confirmed by Rutherford backscattering channeling spectrometry measurements.The monotonical uniaxial lattice expansion along the a direction(out-of-plane direction)is observed as a function of fluences till 1×10^(15)cm^(-2),which ceases at the overdose of 5×10^(15)cm^(-2)due to the partial amorphization in the surface region.Upon raising irradiation dose,a yellow emission in the as-grown sample is gradually quenched,probably due to the irradiation-induced generation of non-radiative recombination centers.
