Evolution of geometric forms of antenna coils for radiofrequency(RF)inductively coupled plasma(ICP)sources is analyzed.Top effectiveness of flat ICPSs generating plasma"tablet"is shown.Especially effective a...Evolution of geometric forms of antenna coils for radiofrequency(RF)inductively coupled plasma(ICP)sources is analyzed.Top effectiveness of flat ICPSs generating plasma"tablet"is shown.Especially effective are ICPSs using antenna coils enhanced with ferromagnetic cores(FMICPS).It is found that the design of flat ICPSs is simpler and more convenient for the arrangement of plasma diagnostics in comparison with ICPSs of other geometries.Effective flat FMICPS models of different diameters ranging from 10 cm to 100cm are considered.Recommendations are given for development engineers dealing with ICPS devices in general and with radio frequency ion thrusters(RITs)in particular.展开更多
基金Project supported by the Frames of the Russian Federation Government’s Grant for StateSupport of Scientific Research Headed by High Rank Foreign Scientists(11.G34.31.0022)
文摘Evolution of geometric forms of antenna coils for radiofrequency(RF)inductively coupled plasma(ICP)sources is analyzed.Top effectiveness of flat ICPSs generating plasma"tablet"is shown.Especially effective are ICPSs using antenna coils enhanced with ferromagnetic cores(FMICPS).It is found that the design of flat ICPSs is simpler and more convenient for the arrangement of plasma diagnostics in comparison with ICPSs of other geometries.Effective flat FMICPS models of different diameters ranging from 10 cm to 100cm are considered.Recommendations are given for development engineers dealing with ICPS devices in general and with radio frequency ion thrusters(RITs)in particular.
