The diffuse reflectance Fourier trmisfonn infrared spectra of the boron nitride(BN)films deposited on steels by remote microwave plasma chemical vapour deposition(CVD)from borazine with nitrogen,hydrogen and argon wer...The diffuse reflectance Fourier trmisfonn infrared spectra of the boron nitride(BN)films deposited on steels by remote microwave plasma chemical vapour deposition(CVD)from borazine with nitrogen,hydrogen and argon were investigated in the wavenumber range of 400-4000 cm^(-1).It was found that the cubic BN for million depends on production of the intermediate species of cyclo triborazane((BH2NH2)3)and its dehydrogenntion.The structuml bonds of cydotriborazane are similar to that of cubic BN.OptiinUiu conditions for deposited BN films were found to be the bora,zine-nitrogen mixture at the substrate tempera.ture of 550℃.The BN films were n mixture of crystalline cubic BN accounting for the major content and hexagonal BN with relatively low hydrogen content.展开更多
基金Supported by the National Natural Science Foundation of Cliina under grant 59402009.
文摘The diffuse reflectance Fourier trmisfonn infrared spectra of the boron nitride(BN)films deposited on steels by remote microwave plasma chemical vapour deposition(CVD)from borazine with nitrogen,hydrogen and argon were investigated in the wavenumber range of 400-4000 cm^(-1).It was found that the cubic BN for million depends on production of the intermediate species of cyclo triborazane((BH2NH2)3)and its dehydrogenntion.The structuml bonds of cydotriborazane are similar to that of cubic BN.OptiinUiu conditions for deposited BN films were found to be the bora,zine-nitrogen mixture at the substrate tempera.ture of 550℃.The BN films were n mixture of crystalline cubic BN accounting for the major content and hexagonal BN with relatively low hydrogen content.
