Digital Holography (DH) has brought a new impetus to the field of holography. The fields of imaging, microscopy and metrology have all benefited from these developments. In this paper some of these developments will b...Digital Holography (DH) has brought a new impetus to the field of holography. The fields of imaging, microscopy and metrology have all benefited from these developments. In this paper some of these developments will be described with some applications in the fields of color imaging, amplitude and phase microscopy and dynamic metrology. It is envisaged that this field will rapidly advance in the next couple of years and become an expected imaging and measurement modality especially in the field of micro, nano and bio sciences.展开更多
In-line digital holography helps to relax the spatial resolution requirement on charge-coupled device sensors for digital recording of holograms and to utilize the full sensing area for image reconstruction which prov...In-line digital holography helps to relax the spatial resolution requirement on charge-coupled device sensors for digital recording of holograms and to utilize the full sensing area for image reconstruction which provides larger field of view and better imaging resolution. In this letter, a lensless in-line digital holographic microscopy is presented for dynamic metrology of micro-electro-mechanical system devices. The methodologies of interferometry and time-averaged in-line digital holography are presented for dynamic measurements, which are also useful for simultaneous suppression of in-line waves from real image wave. The experimental results are presented for dynamic thermal characterization of microheater and vibration analysis of cantilevers.展开更多
文摘Digital Holography (DH) has brought a new impetus to the field of holography. The fields of imaging, microscopy and metrology have all benefited from these developments. In this paper some of these developments will be described with some applications in the fields of color imaging, amplitude and phase microscopy and dynamic metrology. It is envisaged that this field will rapidly advance in the next couple of years and become an expected imaging and measurement modality especially in the field of micro, nano and bio sciences.
基金supported by the National Research Foundation of Singapore under Proof of Con-cept (POC) scheme (No 2008 NRF-POC0001-068)
文摘In-line digital holography helps to relax the spatial resolution requirement on charge-coupled device sensors for digital recording of holograms and to utilize the full sensing area for image reconstruction which provides larger field of view and better imaging resolution. In this letter, a lensless in-line digital holographic microscopy is presented for dynamic metrology of micro-electro-mechanical system devices. The methodologies of interferometry and time-averaged in-line digital holography are presented for dynamic measurements, which are also useful for simultaneous suppression of in-line waves from real image wave. The experimental results are presented for dynamic thermal characterization of microheater and vibration analysis of cantilevers.