Dwell time plays a vital role in determining the accuracy and convergence of the computer-controlled optical surfacing process.However,optimizing dwell time presents a challenge due to its ill-posed nature,resulting i...Dwell time plays a vital role in determining the accuracy and convergence of the computer-controlled optical surfacing process.However,optimizing dwell time presents a challenge due to its ill-posed nature,resulting in non-unique solutions.To address this issue,several well-known methods have emerged,including the iterative,Bayesian,Fourier transform,and matrix-form methods.Despite their independent development,these methods share common objectives,such as minimizing residual errors,ensuring dwell time's positivity and smoothness,minimizing total processing time,and enabling flexible dwell positions.This paper aims to comprehensively review the existing dwell time optimization methods,explore their interrelationships,provide insights for their effective implementations,evaluate their performances,and ultimately propose a unified dwell time optimization methodology.展开更多
基金supported by the Accelerator and Detector Research Program,part of the Scientific User Facility Division of the Basic Energy Science Office of the U.S.Department of Energy(DOE),under the Field Work Proposal No.FWP-PS032This research was performed at the Optical Metrology Laboratory at the National Synchrotron Light Source II,a U.S.DOE Office of Science User Facility operated by Brookhaven National Laboratory(BNL)under Contract No.DE-SC0012704This work was performed under the BNL LDRD 17-016“Diffraction limited and wavefront preserving reflective optics development.”This work was also supported by the Natural Science Foundation of Fujian Province,China,under grant number 2022J011245.
文摘Dwell time plays a vital role in determining the accuracy and convergence of the computer-controlled optical surfacing process.However,optimizing dwell time presents a challenge due to its ill-posed nature,resulting in non-unique solutions.To address this issue,several well-known methods have emerged,including the iterative,Bayesian,Fourier transform,and matrix-form methods.Despite their independent development,these methods share common objectives,such as minimizing residual errors,ensuring dwell time's positivity and smoothness,minimizing total processing time,and enabling flexible dwell positions.This paper aims to comprehensively review the existing dwell time optimization methods,explore their interrelationships,provide insights for their effective implementations,evaluate their performances,and ultimately propose a unified dwell time optimization methodology.
