A low finenesse Fabry-Perot interferometric displacement sensor has been developed and tested. With using a high stability He-Ne laser and perfect signal processing circuits, noise level of 0. 01nm equivalent to refle...A low finenesse Fabry-Perot interferometric displacement sensor has been developed and tested. With using a high stability He-Ne laser and perfect signal processing circuits, noise level of 0. 01nm equivalent to reflector displacement was obtained in a bandwidth of 0-1 kHz.展开更多
文摘A low finenesse Fabry-Perot interferometric displacement sensor has been developed and tested. With using a high stability He-Ne laser and perfect signal processing circuits, noise level of 0. 01nm equivalent to reflector displacement was obtained in a bandwidth of 0-1 kHz.
