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Effect of dummy vias on interconnect temperature variation 被引量:1
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作者 wang zeng dong gang yang yintang li jianwei 《Chinese Science Bulletin》 SCIE EI CAS 2011年第21期2286-2290,共5页
The number of the dummy via can significantly affect the interconnect average temperature.This paper explores the modeling of the interconnect average temperature in the presence of multiple dummy vias.The proposed mo... The number of the dummy via can significantly affect the interconnect average temperature.This paper explores the modeling of the interconnect average temperature in the presence of multiple dummy vias.The proposed model incorporates the multi-via effect into the effective thermal conductivity of the interlayer dielectric (ILD) to obtain accurate results.Using different ILDs,the multi-via effect is analyzed and discussed.Also,the extended applications of the multi-via effect are presented in this paper to obtain the minimum interconnect average temperature increase with a given via separation or number.This study suggests that the multi-via effect should be accounted for in integrated circuits design to optimize the performance and design accuracy of integrated circuits. 展开更多
关键词 互连 温度变化 集成电路设计 平均温度 平均气温 层间绝缘 优化设计 ILD
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