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Field Electron Emission from Diamond - like Carbon Films
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作者 ZHANGBing-lin wangxiao-ping 《Semiconductor Photonics and Technology》 CAS 1999年第3期152-155,共4页
A low turn-on field electron emission from diamond-like carbon films has been observed for the first time to author’s knowledge.Carbon films were prepared by microwave plasma chemical vapor deposition (CVD).Special p... A low turn-on field electron emission from diamond-like carbon films has been observed for the first time to author’s knowledge.Carbon films were prepared by microwave plasma chemical vapor deposition (CVD).Special pretreatment ceramic substrates were used. The characteristics of the film have been identified by using X-ray diffraction(XRD),and Raman spectrum. The field emission experiment has been performed in a vacuum chamber with a base pressure of about 10 -5 Pa. The turn-on field of 1.2 V/μm,and the current density of 1.25 mA/cm 2 at electric field of 6 V/μm were obtained. 展开更多
关键词 Chemical Vapor Deposition DIAMOND Diamond-like Carbon Field Emission CLC number:O472 Document code:A
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