为了解决高温恶劣环境下压力测量问题,设计了一种大压力、高过载、耐高温、耐恶劣环境的小体积压差传感器。通过有限元分析对传感器绝缘体上硅(silicon on insulator,SOI)压力敏感膜片结构进行优化设计,使其能够满足恶劣环境的使用要求...为了解决高温恶劣环境下压力测量问题,设计了一种大压力、高过载、耐高温、耐恶劣环境的小体积压差传感器。通过有限元分析对传感器绝缘体上硅(silicon on insulator,SOI)压力敏感膜片结构进行优化设计,使其能够满足恶劣环境的使用要求。通过试验证明这种压差传感器具有良好的耐高温、耐恶劣环境的特性。展开更多
Because the melting point of the alkalis is very high and the metal activity is strong, the common pressure sensor can't be used to measure pressure of liquid metal. In this paper, a differential transformer differen...Because the melting point of the alkalis is very high and the metal activity is strong, the common pressure sensor can't be used to measure pressure of liquid metal. In this paper, a differential transformer differential pressure sensor for measuring liquid alkalis pressure is designed, the working principle and specific design plan of the sensor are introduced, the standard current signal ( 4 -20 mA) or digital communication RS485 can be output according to the needs, and the functions of remote monitoring and data optimization can be realized through the LAN interface.展开更多
文摘为了解决高温恶劣环境下压力测量问题,设计了一种大压力、高过载、耐高温、耐恶劣环境的小体积压差传感器。通过有限元分析对传感器绝缘体上硅(silicon on insulator,SOI)压力敏感膜片结构进行优化设计,使其能够满足恶劣环境的使用要求。通过试验证明这种压差传感器具有良好的耐高温、耐恶劣环境的特性。
文摘Because the melting point of the alkalis is very high and the metal activity is strong, the common pressure sensor can't be used to measure pressure of liquid metal. In this paper, a differential transformer differential pressure sensor for measuring liquid alkalis pressure is designed, the working principle and specific design plan of the sensor are introduced, the standard current signal ( 4 -20 mA) or digital communication RS485 can be output according to the needs, and the functions of remote monitoring and data optimization can be realized through the LAN interface.