Observation of low-frequency oscillation in argon helicon discharge

We present here a kind of low-frequency oscillation in argon helicon discharge with a half helical antenna.This time-dependent instability shows a global quasi-periodic oscillation of plasma density and electron temperature,with a typical frequency of a few tens of Hz which increases with external magnetic field as well as radiofrequency(RF)power.The relative oscillation amplitude decreases with magnetic field and RF power,but the rising time and pulse width do not change significantly under different discharge conditions.The oscillation can only be observed in some specific conditions of low magnetic fields and low RF power when the gas flows in from one end of the discharge area and out from another end.This global instability is suggested to be attributed to the pressure instability of neutral depletion,which is the result of compound action of gas depletion by heating expansion and gas replenishment from upstream.There are two kinds of oscillations,large and small amplitude oscillations,occurring in different discharge modes.This study could be a good verification of and complement to earlier experiments.This kind of spontaneous pulse phenomenon is also helpful in realizing a pulsing plasma source without a pulsed power supply.

Study of axial double layer in helicon plasma by optical emission spectroscopy and simple probe

In this work we used a passive measurement method based on a high-impedance electrostatic probe and an optical emission spectroscope （OES） to investigate the characteristics of the double layer （DL） in an argon helicon plasma. The DL can be confirmed by a rapid change in the plasma potential along the axis. The axial potential variation of the passive measurement shows that the DL forms near a region of strong magnetic field gradient when the plasma is operated in wave- coupled mode, and the DL strength increases at higher powers in this experiment. The emission intensity of the argon atom line, which is strongly dependent on the metastable atom concentration, shows a similar spatial distribution to the plasma potential along the axis. The emission intensity of the argon atom line and the argon ion line in the DL suggests the existence of an energetic electron population upstream of the DL. The electron density upstream is much higher than that downstream, which is mainly caused by these energetic electrons.

Effect of magnetic field on double layer in argon helicon plasma

The electric double layer in argon helicon plasma by using floating electrostatic probe and local optical emission spectroscopy under different external magnetic field was investigated.Results show that electrons generated in the plasma source can be magnetized by the magnetic field and transported by the gradient of diverging magnetic field in the diffusion chamber,giving rise to the hollowed distribution of electron temperature.The electron temperature on axis has a sudden decrease,leading to the sudden decrease of plasma density as well as the plasma potential,forming a double layer structure.The position of double layer moves along with the position of diverging magnetic field,and the potential drop increases along with the strength of magnetic field.The structure of the external magnetic field plays the decisive factor for the double layer in helicon plasma.