SYNTHESIS OF PPCuPc FILM BY MICROWAVE PLASMA CHEMICAL VAPORIZATION DEPOSITION(MPCVD)

Using a low power microwave generator(W_(max)=100W) and a Surfatron discharge device, Plasma-polymerized copper phthalocyanine (PPCuPc) film was synthesised from monomer copper phthalocyanine(CuPc) by microwave plasma chemical vaporization deposition(MPCVD) with Ar as incorporation gas. The film was characterized by FTIR and ESCA. The role of dissociation of chemical bond in the polymerization process and the influence of substrate temperature and material on deposition were investigated in some detail.

STUDIES ON THE SYNTHESIS OF Ti_3O_5 BY MICROWAVE INDUCED PLASMA METHOD

Using a low power microwave generator and a surfatron discharge cavity, Ti3O5 was synthesized via the hydrogenation of TiO2 in surface wave induced microwave plasma. Besides, the chemical behavior of hydrogen in the plasma and its influence on the formation of Ti3O5 were preliminarily studied.