Fabrication of micro gratings using a femtosecond laser exposure system is experimentally investigated for the electron moire method. Micro holes and lines are firstly etched for parameter study. Grating profile is th...Fabrication of micro gratings using a femtosecond laser exposure system is experimentally investigated for the electron moire method. Micro holes and lines are firstly etched for parameter study. Grating profile is theoretically optimized to form high quality moire patterns. For a demonstration, a parallel grating is fabricated on a specimen of quartz glass. The minimum line width and the distance between two adjacent lines are both set to be 1 μm, and the frequency of grating is 500 lines/ram. The experimental results indicate that the quality of gratings is good and the relative error of the gratings pitch is about 1.5%. Based on molte method, scanning electron microscope （SEM） moire patterns are observed clearly, which manifests that gratings fabricated with the femtosecond laser exposure is suitable for micro scale deformation measurement.展开更多
基金support from the National Natural Science Foundation of China (11372118 and 11302082)
文摘Fabrication of micro gratings using a femtosecond laser exposure system is experimentally investigated for the electron moire method. Micro holes and lines are firstly etched for parameter study. Grating profile is theoretically optimized to form high quality moire patterns. For a demonstration, a parallel grating is fabricated on a specimen of quartz glass. The minimum line width and the distance between two adjacent lines are both set to be 1 μm, and the frequency of grating is 500 lines/ram. The experimental results indicate that the quality of gratings is good and the relative error of the gratings pitch is about 1.5%. Based on molte method, scanning electron microscope （SEM） moire patterns are observed clearly, which manifests that gratings fabricated with the femtosecond laser exposure is suitable for micro scale deformation measurement.
