This paper presents the design,fabrication,and characterization of cantilever-type resonators with a novel stacked structure.Aluminum nitride is adopted as the material for both the structural layer and the piezoelect...This paper presents the design,fabrication,and characterization of cantilever-type resonators with a novel stacked structure.Aluminum nitride is adopted as the material for both the structural layer and the piezoelectric layer;this simplifies the fabrication process and improves the quality factor of the resonator.Both in-plane and out-of-planeflexural modes were investigated.The effect of the structural dimensions and electrode patterns on the resonator’s performance were also studied.Finite-element simulations and experiments examining anchor loss and thermoelastic damping,which are the main loss mechanisms affecting the quality factor of these resonators,were carried out.The optimal structural dimensions and electrode patterns of the cantilever-type resonators are presented.A quality factor of 7922 with a motional impedance of 88.52 kΩand a quality factor of 8851 with a motional impedance of 67.03 kΩwere achieved for the in-plane and out-of-planeflexural-mode resonators,respectively.The proposed resonator design will contribute to the development of high-performance devices such as accelerometers,gyroscopes,and pressure sensors.展开更多
Microfluidic phenotyping methods have been of vital importance for cellular characterization,especially for evaluating single cells.In order to study the deformability of a single cell,we devised and tested a tunable ...Microfluidic phenotyping methods have been of vital importance for cellular characterization,especially for evaluating single cells.In order to study the deformability of a single cell,we devised and tested a tunable microfluidic chip-based method.A pneumatic polymer polydimethylsiloxane(PDMS)membrane was designed and fabricated abutting a single-cell trapping structure,so the cell could be squeezed controllably in a lateral direction.Cell contour changes under increasing pressure were recorded,enabling the deformation degree of different types of single cell to be analyzed and compared using computer vision.This provides a new perspective for studying mechanical properties of cells at the single cell level.展开更多
基金supported in part by the National Key Research and Development Program of China(Grant No.2020YFB2008800)in part by the Nanchang Institute for Microtechnology of Tianjin University.
文摘This paper presents the design,fabrication,and characterization of cantilever-type resonators with a novel stacked structure.Aluminum nitride is adopted as the material for both the structural layer and the piezoelectric layer;this simplifies the fabrication process and improves the quality factor of the resonator.Both in-plane and out-of-planeflexural modes were investigated.The effect of the structural dimensions and electrode patterns on the resonator’s performance were also studied.Finite-element simulations and experiments examining anchor loss and thermoelastic damping,which are the main loss mechanisms affecting the quality factor of these resonators,were carried out.The optimal structural dimensions and electrode patterns of the cantilever-type resonators are presented.A quality factor of 7922 with a motional impedance of 88.52 kΩand a quality factor of 8851 with a motional impedance of 67.03 kΩwere achieved for the in-plane and out-of-planeflexural-mode resonators,respectively.The proposed resonator design will contribute to the development of high-performance devices such as accelerometers,gyroscopes,and pressure sensors.
基金The authors gratefully acknowledge financial support from National Key R&D Program of China(2018YFE0118700)the National Natural Science Foundation of China(NSFC No.62174119)+1 种基金the 111 Project(B07014)the Foundation for Talent Scientists of Nanchang Institute for Micro-technology of Tianjin University.
文摘Microfluidic phenotyping methods have been of vital importance for cellular characterization,especially for evaluating single cells.In order to study the deformability of a single cell,we devised and tested a tunable microfluidic chip-based method.A pneumatic polymer polydimethylsiloxane(PDMS)membrane was designed and fabricated abutting a single-cell trapping structure,so the cell could be squeezed controllably in a lateral direction.Cell contour changes under increasing pressure were recorded,enabling the deformation degree of different types of single cell to be analyzed and compared using computer vision.This provides a new perspective for studying mechanical properties of cells at the single cell level.
