To solve the problem on the microstructural characterization of metallic superlattices,taking the NiFe/Cu superlattices as example,we show that the sturctures of metallic superlattices can be characterized exactly by ...To solve the problem on the microstructural characterization of metallic superlattices,taking the NiFe/Cu superlattices as example,we show that the sturctures of metallic superlattices can be characterized exactly by combining low-angle X-ray diffraction with high-angle X-ray diffraction.First,we determine exactly the total film thickness by a straightforward and precise method based on a modified Bragg law from the subsidiary maxima around the low-angle X-ray diffraction peak.Then.by combining with the simulation of high-angle X-ray diffraction.we obtain the sturctural parameters such as the superlattice period,the sublayer and buffer thickness,This characterization procedure is also applicable to other types of metallic superlattices.展开更多
文摘To solve the problem on the microstructural characterization of metallic superlattices,taking the NiFe/Cu superlattices as example,we show that the sturctures of metallic superlattices can be characterized exactly by combining low-angle X-ray diffraction with high-angle X-ray diffraction.First,we determine exactly the total film thickness by a straightforward and precise method based on a modified Bragg law from the subsidiary maxima around the low-angle X-ray diffraction peak.Then.by combining with the simulation of high-angle X-ray diffraction.we obtain the sturctural parameters such as the superlattice period,the sublayer and buffer thickness,This characterization procedure is also applicable to other types of metallic superlattices.
