A droplet-based actuating chip by using the method of electrowetting-on-dielectric(EWOD)was developed to manipulate the microfluidics.Here,the actuation mechanism of the sandwiched-configuration EWOD chips was careful...A droplet-based actuating chip by using the method of electrowetting-on-dielectric(EWOD)was developed to manipulate the microfluidics.Here,the actuation mechanism of the sandwiched-configuration EWOD chips was carefully studied,and the movement of droplets was numerically analyzed by using the computational fluidic software,CFD-ACE+.The fabrication of the chip,including a heavily phosphorus-doped poly-silicon micro-electrode array and a thermally grown SiO2 dielectric layer,was exploited to improve the chip stability and decrease the actuation voltage.In experiments,the transportation of a deionized droplet of about 0.5μL is successfully achieved in air by applying the low voltage of 45 V.展开更多
基金supported by the National Natural Science Foundation of China (Grant No.10472055)the Fundamental Research Foundation of Tsinghua University (No.JC2003060).
文摘A droplet-based actuating chip by using the method of electrowetting-on-dielectric(EWOD)was developed to manipulate the microfluidics.Here,the actuation mechanism of the sandwiched-configuration EWOD chips was carefully studied,and the movement of droplets was numerically analyzed by using the computational fluidic software,CFD-ACE+.The fabrication of the chip,including a heavily phosphorus-doped poly-silicon micro-electrode array and a thermally grown SiO2 dielectric layer,was exploited to improve the chip stability and decrease the actuation voltage.In experiments,the transportation of a deionized droplet of about 0.5μL is successfully achieved in air by applying the low voltage of 45 V.