Wireless passive temperature sensors fabricated by polymer-derived SiBCN ceramic(PDC-SiBCN) pyrolyzed at different temperatures was studied.The resonant frequency of the sensors was measured in the temperature range o...Wireless passive temperature sensors fabricated by polymer-derived SiBCN ceramic(PDC-SiBCN) pyrolyzed at different temperatures was studied.The resonant frequency of the sensors was measured in the temperature range of50 to 610℃.For the sensor made of the PDC-SiBCN pyrolyzed at 1000,1100 and 1200℃ individually,the resonant frequency decreased monotonically with developing the testing temperature.While for the sensor made of the PDC-SiBCN pyrolyzed at 1300℃,the resonant frequency showed a non-monotonic variation with testing temperature.The results suggest a possibility of tuning the resonant frequency of PDC-SiBCN based wireless passive temperature sensors by altering the pyrolysis temperature.展开更多
文摘Wireless passive temperature sensors fabricated by polymer-derived SiBCN ceramic(PDC-SiBCN) pyrolyzed at different temperatures was studied.The resonant frequency of the sensors was measured in the temperature range of50 to 610℃.For the sensor made of the PDC-SiBCN pyrolyzed at 1000,1100 and 1200℃ individually,the resonant frequency decreased monotonically with developing the testing temperature.While for the sensor made of the PDC-SiBCN pyrolyzed at 1300℃,the resonant frequency showed a non-monotonic variation with testing temperature.The results suggest a possibility of tuning the resonant frequency of PDC-SiBCN based wireless passive temperature sensors by altering the pyrolysis temperature.
