The mechanical balance process is the key process to eliminate the quadrature error and improve the performance of the cupped wave gyro. The conventional mechanical balance method for cupped wave gyro based on cup-wal...The mechanical balance process is the key process to eliminate the quadrature error and improve the performance of the cupped wave gyro. The conventional mechanical balance method for cupped wave gyro based on cup-wall trimming requires high control accuracy of trimming quantity, which increases the production cost and decreases the fabrication efficiency in large extent. However, it is hard to reach the high balance accuracy with the natural frequency split of mHz grade by using the conventional method. In this paper, the lumped mass dynamic model of the cupped wave gyro is built by discretization method, and the effects of different position trimming on the natural frequency are analyzed. It is pointed out that trimming off a tiny quantity of material from cup-wall causes large variation of the natural frequency is the main reason for the low accuracy of the conventional mechanical balance method. Then, a precision balance method for cupped wave gyro based on cup-bottom trimming is presented and the entire procedures of this method are given. The static balance process and dynamic balance process of the precision balance method are simulated by the finite element software. The simulation result shows that the precision balance method based on cup-bottom trimming brings less additional natural frequency split in the static balance process, minimizes the natural frequency split to mHz grade and rectify the angle of mode offset to 0.1° grade in the dynamic balance process, furthermore, the method decreases the requirement for control accuracy of trimming quantity evidently. The research work provides references for structure optimization design and balance process plan of the cupped wave gyro.展开更多
The quality factor(Q factor)is a crucial performance parameter for resonators.In this paper,a novel release method for highquality micro fused silica shell resonators with teeth-like tines with good surface morphology...The quality factor(Q factor)is a crucial performance parameter for resonators.In this paper,a novel release method for highquality micro fused silica shell resonators with teeth-like tines with good surface morphology is proposed.This method is based on femtosecond laser-assisted chemical etching.First,the optimal energy range of femtosecond laser modification is obtained through mechanism analysis.Second,the optimal parameters for a straight line and arc pattern are determined by optimizing the average output power,processing speed,and processing spacing.The results demonstrate why edge breakage in rounded corners is easy under different parameters.Finally,according to these conclusions,the processing is performed on a micro fused silica shell resonator with a Q factor exceeding 6 million.In addition,subsurface damage is rare throughout the fabrication process,and the surface roughness of the released cross section reaches the nanometer level.The improved Q factor helps suppress mechanical thermal noise and reduce zero bias and zero bias drift,constituting the primary method for enhancing the performance of the resonant gyroscope.展开更多
基金supported by National Natural Science Foundation of China (Grant No. 51005239)
文摘The mechanical balance process is the key process to eliminate the quadrature error and improve the performance of the cupped wave gyro. The conventional mechanical balance method for cupped wave gyro based on cup-wall trimming requires high control accuracy of trimming quantity, which increases the production cost and decreases the fabrication efficiency in large extent. However, it is hard to reach the high balance accuracy with the natural frequency split of mHz grade by using the conventional method. In this paper, the lumped mass dynamic model of the cupped wave gyro is built by discretization method, and the effects of different position trimming on the natural frequency are analyzed. It is pointed out that trimming off a tiny quantity of material from cup-wall causes large variation of the natural frequency is the main reason for the low accuracy of the conventional mechanical balance method. Then, a precision balance method for cupped wave gyro based on cup-bottom trimming is presented and the entire procedures of this method are given. The static balance process and dynamic balance process of the precision balance method are simulated by the finite element software. The simulation result shows that the precision balance method based on cup-bottom trimming brings less additional natural frequency split in the static balance process, minimizes the natural frequency split to mHz grade and rectify the angle of mode offset to 0.1° grade in the dynamic balance process, furthermore, the method decreases the requirement for control accuracy of trimming quantity evidently. The research work provides references for structure optimization design and balance process plan of the cupped wave gyro.
基金supported by the National Natural Science Foundation of China Regional Innovation and Development Joint Fund Key Support Project(Grant No.U21A20505)the National Natural Science Foundation of China(Grant Nos.62204261 and 52205613)。
文摘The quality factor(Q factor)is a crucial performance parameter for resonators.In this paper,a novel release method for highquality micro fused silica shell resonators with teeth-like tines with good surface morphology is proposed.This method is based on femtosecond laser-assisted chemical etching.First,the optimal energy range of femtosecond laser modification is obtained through mechanism analysis.Second,the optimal parameters for a straight line and arc pattern are determined by optimizing the average output power,processing speed,and processing spacing.The results demonstrate why edge breakage in rounded corners is easy under different parameters.Finally,according to these conclusions,the processing is performed on a micro fused silica shell resonator with a Q factor exceeding 6 million.In addition,subsurface damage is rare throughout the fabrication process,and the surface roughness of the released cross section reaches the nanometer level.The improved Q factor helps suppress mechanical thermal noise and reduce zero bias and zero bias drift,constituting the primary method for enhancing the performance of the resonant gyroscope.
