This paper describes the specially designed geometry of a dry-etched large-wedge-angle silica microdisk resonator that enables anomalous dispersion in the 780 nm wavelength regime. This anomalous dispersion occurs nat...This paper describes the specially designed geometry of a dry-etched large-wedge-angle silica microdisk resonator that enables anomalous dispersion in the 780 nm wavelength regime. This anomalous dispersion occurs naturally without the use of a mode-hybridization technique to control the geometrical dispersion. By fabricating a1-μm-thick silica microdisk with a wedge angle as large as 56° and an optical Q-factor larger than 107, we achieve a visible Kerr comb that covers the wavelength interval of 700–897 nm. The wide optical frequency range and the closeness to the clock transition at 698 nm of 87 Sr atoms make our visible comb a potentially useful tool in optical atomic clock applications.展开更多
A novel type of mid-IR microresonator,the chalcogenide glass(ChG)microfiber knot resonator(MKR),is demonstrated,showing easy fabrication,fiber-compatible features,resonance tunability,and high robustness.ChG micro fib...A novel type of mid-IR microresonator,the chalcogenide glass(ChG)microfiber knot resonator(MKR),is demonstrated,showing easy fabrication,fiber-compatible features,resonance tunability,and high robustness.ChG micro fibers with typical diameters around 3μm are taper-drawn from As2S3 glass fibers and assembled into MKRs in liquid without surface damage.The measured Q factor of a typical 824μm diameter ChG MKR is about 2.84×104 at the wavelength of 4469.14 nm.The free spectral range(FSR)of the MKR can be tuned from2.0 nm(28.4 GHz)to 9.6 nm(135.9 GHz)by tightening the knot structure in liquid.Benefitting from the high thermal expansion coefficient of As2S3 glass,the MKR exhibits a thermal tuning rate of 110 pm·℃^-1 at the resonance peak.When embedded in polymethyl methacrylate(PMMA)film,a 551μm diameter MKR retains a Q factor of 1.1×10^4.The ChG MKRs demonstrated here are highly promising for resonator-based optical technologies and applications in the mid-IR spectral range.展开更多
We experimentally demonstrate high optical quality factor silica microdisk resonators on a silicon chip with large wedge angles by reactive ion etching. For 2-μm-thick microresonators, we have achieved wedge angles o...We experimentally demonstrate high optical quality factor silica microdisk resonators on a silicon chip with large wedge angles by reactive ion etching. For 2-μm-thick microresonators, we have achieved wedge angles of 59°, 63°,70°, and 79° with optical quality factors of 2.4 × 10~7, 8.1 × 10~6, 5.9 × 10~6, and 7.4 × 10~6, respectively, from ~80 μm diameter microresonators in the 1550 nm wavelength band. Also, for 1-μm-thick microresonators, we have obtained an optical quality factor of 7.3 × 10~6 with a wedge angle of 74°.展开更多
We demonstrate the fabrication of ultrahigh quality(Q) factor silica microdisk resonators on a silicon chip by inductively coupled plasma(ICP) etching. We achieve a dry-etched optical microresonator with an intrinsic ...We demonstrate the fabrication of ultrahigh quality(Q) factor silica microdisk resonators on a silicon chip by inductively coupled plasma(ICP) etching. We achieve a dry-etched optical microresonator with an intrinsic Q factor as high as 1.94×10^(8) from a 1-mm-diameter silica microdisk with a thickness of 4 μm. Our work provides a chip-based microresonator platform operating in the ultrahigh-Q region that will be useful in nonlinear photonics such as Brillouin lasers and Kerr microcombs.展开更多
By overcoming fabrication limitations, we have successfully fabricated silica toroid microcavities with both large diameter(of 1.88 mm) and ultra-high-Q factor(of 3.3 × 10~8) for the first time, to the best of ou...By overcoming fabrication limitations, we have successfully fabricated silica toroid microcavities with both large diameter(of 1.88 mm) and ultra-high-Q factor(of 3.3 × 10~8) for the first time, to the best of our knowledge. By employing these resonators, we have further demonstrated low-threshold Kerr frequency combs on a silicon chip,which allow us to obtain a repetition rate as low as 36 GHz. Such a low repetition rate frequency comb can now bedirectly measured through a commercialized optical-electronic detector.展开更多
We demonstrate an ultra-low-threshold phonon laser using a coupled-microtoroid-cavity system by introducing a novel coupling approach.The scheme exhibits both high optical quality factors and high mechanical quality f...We demonstrate an ultra-low-threshold phonon laser using a coupled-microtoroid-cavity system by introducing a novel coupling approach.The scheme exhibits both high optical quality factors and high mechanical quality factors.We have experimentally obtained the mechanical quality factor up to 18,000 in vacuum for a radialbreathing mode of 59.2 MHz.The measured phonon lasing threshold is as low as 1.2μW,which is~5 times lower than the previous result.展开更多
基金National Key R&D Program of China(2016YFA0302500,2017YFA0303703)National Natural Science Foundation of China(NSFC)(61435007,11574144,11621091,61475099)
文摘This paper describes the specially designed geometry of a dry-etched large-wedge-angle silica microdisk resonator that enables anomalous dispersion in the 780 nm wavelength regime. This anomalous dispersion occurs naturally without the use of a mode-hybridization technique to control the geometrical dispersion. By fabricating a1-μm-thick silica microdisk with a wedge angle as large as 56° and an optical Q-factor larger than 107, we achieve a visible Kerr comb that covers the wavelength interval of 700–897 nm. The wide optical frequency range and the closeness to the clock transition at 698 nm of 87 Sr atoms make our visible comb a potentially useful tool in optical atomic clock applications.
基金National Natural Science Foundation of China(11527901,61635009,61922040)Fundamental Research Funds for the Central Universities。
文摘A novel type of mid-IR microresonator,the chalcogenide glass(ChG)microfiber knot resonator(MKR),is demonstrated,showing easy fabrication,fiber-compatible features,resonance tunability,and high robustness.ChG micro fibers with typical diameters around 3μm are taper-drawn from As2S3 glass fibers and assembled into MKRs in liquid without surface damage.The measured Q factor of a typical 824μm diameter ChG MKR is about 2.84×104 at the wavelength of 4469.14 nm.The free spectral range(FSR)of the MKR can be tuned from2.0 nm(28.4 GHz)to 9.6 nm(135.9 GHz)by tightening the knot structure in liquid.Benefitting from the high thermal expansion coefficient of As2S3 glass,the MKR exhibits a thermal tuning rate of 110 pm·℃^-1 at the resonance peak.When embedded in polymethyl methacrylate(PMMA)film,a 551μm diameter MKR retains a Q factor of 1.1×10^4.The ChG MKRs demonstrated here are highly promising for resonator-based optical technologies and applications in the mid-IR spectral range.
基金supported by the National Basic Research Program of China (Nos. 2012CB921804 and 2011CBA00205)the National Natural Science Foundation of China (Nos. 61435007 and 11321063)
文摘We experimentally demonstrate high optical quality factor silica microdisk resonators on a silicon chip with large wedge angles by reactive ion etching. For 2-μm-thick microresonators, we have achieved wedge angles of 59°, 63°,70°, and 79° with optical quality factors of 2.4 × 10~7, 8.1 × 10~6, 5.9 × 10~6, and 7.4 × 10~6, respectively, from ~80 μm diameter microresonators in the 1550 nm wavelength band. Also, for 1-μm-thick microresonators, we have obtained an optical quality factor of 7.3 × 10~6 with a wedge angle of 74°.
基金National Key Research and Development Program of China(2016YFA0302500,2017YFA0303703)National Natural Science Foundation of China(NFSC)(61922040,11621091)Fundamental Research Funds for the Central Universities(021314380149)。
文摘We demonstrate the fabrication of ultrahigh quality(Q) factor silica microdisk resonators on a silicon chip by inductively coupled plasma(ICP) etching. We achieve a dry-etched optical microresonator with an intrinsic Q factor as high as 1.94×10^(8) from a 1-mm-diameter silica microdisk with a thickness of 4 μm. Our work provides a chip-based microresonator platform operating in the ultrahigh-Q region that will be useful in nonlinear photonics such as Brillouin lasers and Kerr microcombs.
基金National Key R&D Program of China(2017YFA0303703,2016YFA0302500)National Natural Science Foundation of China(NSFC)(61435007,11574144,61475099)+1 种基金Natural Science Foundation of Jiangsu Province,China(BK20150015)Fundamental Research Funds for the Central Universities(021314380086)
文摘By overcoming fabrication limitations, we have successfully fabricated silica toroid microcavities with both large diameter(of 1.88 mm) and ultra-high-Q factor(of 3.3 × 10~8) for the first time, to the best of our knowledge. By employing these resonators, we have further demonstrated low-threshold Kerr frequency combs on a silicon chip,which allow us to obtain a repetition rate as low as 36 GHz. Such a low repetition rate frequency comb can now bedirectly measured through a commercialized optical-electronic detector.
基金National Key Research and Development Program(2016YFA0302500)National Natural Science Foundation of China(NSFC)(61435007,11574144)+1 种基金Natural Science Foundation of Jiangsu Province(BK20150015)Fundamental Research Funds for the Central Universities
文摘We demonstrate an ultra-low-threshold phonon laser using a coupled-microtoroid-cavity system by introducing a novel coupling approach.The scheme exhibits both high optical quality factors and high mechanical quality factors.We have experimentally obtained the mechanical quality factor up to 18,000 in vacuum for a radialbreathing mode of 59.2 MHz.The measured phonon lasing threshold is as low as 1.2μW,which is~5 times lower than the previous result.