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A Multiple Phase-Shifted Distributed Feedback(DFB)Laser Fabricated by Nanoimprint Lithography 被引量:1
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作者 ZUO Qiang ZHAO Jian-Yi +6 位作者 CHEN Xin WANG Zhi-Hao SUN Tang-You ZHOU Ning ZHAO Yan-Li xu zhi-mou LIU Wen 《Chinese Physics Letters》 SCIE CAS CSCD 2013年第5期67-69,共3页
Multiple phase-shifted(MPS)diffraction grating is an effective way proposed to overcome the spatial hole burning(SHB)effect in a distributed feedback(DFB)laser.We present two symmetric λ/8 phase-shifted DFB lasers by... Multiple phase-shifted(MPS)diffraction grating is an effective way proposed to overcome the spatial hole burning(SHB)effect in a distributed feedback(DFB)laser.We present two symmetric λ/8 phase-shifted DFB lasers by using nanoimprint lithography(NIL).The threshold current of a typical laser is less than 15 mA.The side mode suppression ratio(SMSR)is still above 42 dB even at 100 mA current injection.To show the versatility of NIL,eight different wavelength MPS-DFB lasers on this single chip are also demonstrated.Our results prove that NIL is a promising tool for fabricating high performance complex grating DFB lasers. 展开更多
关键词 LITHOGRAPHY shifted OVERCOME
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