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Cold Light Mirror Fabricated by Electr on Beam Evaporation of TiO_2 and SiO_2
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作者 zhongDi-sheng xuguang-zhong 《Semiconductor Photonics and Technology》 CAS 2000年第1期59-64,共6页
A process suitable for production on a large scale of cold light mirror for film projector is introduced. Deposition parameters required for producing TiO 2/SiO 2 optical multilayer systems by electron beam evaporatio... A process suitable for production on a large scale of cold light mirror for film projector is introduced. Deposition parameters required for producing TiO 2/SiO 2 optical multilayer systems by electron beam evaporation of TiO 2 and SiO 2 starting materials are investigated. Manufacture and techniques of cold mirror and the adhesion,stability, wear and corrosion resistance of cold mirror by this process are discussed. The result shows that cold mirror produced has good optical properties and better adhesion. 展开更多
关键词 冷光镜 淀积过程 电子束消散 光学涂层 TiO2 SIO2
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