Diamond cutting is a popular method to fabricate microlens array (MLA) on polymethyl methacrylate (PMMA);however, it is limited by brittle fracture, which is formed easily on the surface of MLA during the cutting proc...Diamond cutting is a popular method to fabricate microlens array (MLA) on polymethyl methacrylate (PMMA);however, it is limited by brittle fracture, which is formed easily on the surface of MLA during the cutting process. In this paper, the formation mechanism of the brittle fracture is studied via a series of experiments including the slow tool servo (STS) cutting experiment of MLA, surface scratching experiment and suddenstop cutting experiment. The effects of undeformed chip thickness, feed rate, and machining track on brittle fracture formation are investigated in detail. In addition, based on the fracture formation mechanism, a bi-directional cutting approach is proposed to eliminate the regional brittle fracture of the microlens during diamond cutting. An experiment was then conducted to verify the method;the results demonstrated that bi-directional cutting could eliminate brittle fracture entirely. Finally, a spherical MLA with the form error (vPV) of 60 nm and the surface roughness (Ra) of 8 nm was successfully fabricated.展开更多
基金the National Key Basic Research Program of China (Grant No. 2015CB059900)the National Natural Science Foundation of China (Grant No. 51775046)The authors would also like to acknowledge the support from the Fok Ying-Tong Education Foundation for Young Teachers in the Higher Education Institutions of China (Grant No. 151052).
文摘Diamond cutting is a popular method to fabricate microlens array (MLA) on polymethyl methacrylate (PMMA);however, it is limited by brittle fracture, which is formed easily on the surface of MLA during the cutting process. In this paper, the formation mechanism of the brittle fracture is studied via a series of experiments including the slow tool servo (STS) cutting experiment of MLA, surface scratching experiment and suddenstop cutting experiment. The effects of undeformed chip thickness, feed rate, and machining track on brittle fracture formation are investigated in detail. In addition, based on the fracture formation mechanism, a bi-directional cutting approach is proposed to eliminate the regional brittle fracture of the microlens during diamond cutting. An experiment was then conducted to verify the method;the results demonstrated that bi-directional cutting could eliminate brittle fracture entirely. Finally, a spherical MLA with the form error (vPV) of 60 nm and the surface roughness (Ra) of 8 nm was successfully fabricated.
