We study the influence of the thermodynamic coefficients on transient negative capacitance for the Zr-doped HfO_(2)(HZO)ferroelectric capacitors by the theoretical simulation based on the Landau-Khalatnikov(L-K)theory...We study the influence of the thermodynamic coefficients on transient negative capacitance for the Zr-doped HfO_(2)(HZO)ferroelectric capacitors by the theoretical simulation based on the Landau-Khalatnikov(L-K)theory and experimental measurement of electrical properties in the resistor-ferroelectric capacitor(R-FEC)circuit.Our results show that the thermodynamic coefficientsα,βandγalso play a key role for the transient NC effect besides the viscosity coefficient and series resistor.Moreover,the smaller coefficientsαandβ,the more significant the transient NC effect.In addition,we also find that the thermodynamic process of transient NC does not obey the generally accepted viewpoint of Gibbs free energy minimization.展开更多
基金Project supported by the National Key Project of Science and Technology of China(Grant No.2017ZX02315001-002)。
文摘We study the influence of the thermodynamic coefficients on transient negative capacitance for the Zr-doped HfO_(2)(HZO)ferroelectric capacitors by the theoretical simulation based on the Landau-Khalatnikov(L-K)theory and experimental measurement of electrical properties in the resistor-ferroelectric capacitor(R-FEC)circuit.Our results show that the thermodynamic coefficientsα,βandγalso play a key role for the transient NC effect besides the viscosity coefficient and series resistor.Moreover,the smaller coefficientsαandβ,the more significant the transient NC effect.In addition,we also find that the thermodynamic process of transient NC does not obey the generally accepted viewpoint of Gibbs free energy minimization.