The reflectometry is a common method used to measure the thickness of thin films. Using a conventional method,its measurable range is limited due to the low resolution of the current spectrometer embedded in the refle...The reflectometry is a common method used to measure the thickness of thin films. Using a conventional method,its measurable range is limited due to the low resolution of the current spectrometer embedded in the reflectometer.We present a simple method, using cubic spline interpolation to resample the spectrum with a high resolution,to extend the measurable transparent film thickness. A large measuring range up to 385 m in optical thickness is achieved with the commonly used system. The numerical calculation and experimental results demonstrate that using the FFT method combined with cubic spline interpolation resampling in reflectrometry, a simple,easy-to-operate, economic measuring system can be achieved with high measuring accuracy and replicability.展开更多
基金Supported by the National Natural Science Foundation of China under Grant No 11604115the Educational Commission of Jiangsu Province of China under Grant No 17KJA460004the Huaian Science and Technology Funds under Grant No HAC201701
文摘The reflectometry is a common method used to measure the thickness of thin films. Using a conventional method,its measurable range is limited due to the low resolution of the current spectrometer embedded in the reflectometer.We present a simple method, using cubic spline interpolation to resample the spectrum with a high resolution,to extend the measurable transparent film thickness. A large measuring range up to 385 m in optical thickness is achieved with the commonly used system. The numerical calculation and experimental results demonstrate that using the FFT method combined with cubic spline interpolation resampling in reflectrometry, a simple,easy-to-operate, economic measuring system can be achieved with high measuring accuracy and replicability.
