The distribution of plasma density in the vicinity of the W Mo alloy source in the process of double glow discharge plasma surface alloying was diagnosed using the moveable Langmuir probe. The sputtering law, surface ...The distribution of plasma density in the vicinity of the W Mo alloy source in the process of double glow discharge plasma surface alloying was diagnosed using the moveable Langmuir probe. The sputtering law, surface composition and morphological variation of the W Mo alloy source was studied. The experimental results show that there exists obvious preferential sputtering on the surface of the W Mo alloy source under the argon ion bombardment; the stable period is reached after a transitional period, and the preferential sputtering occurs in a definite range of composition(mole fraction): 70%～75% Mo, 22%～25% W; there appears segregation on the surface of the W Mo alloy source.展开更多
文摘The distribution of plasma density in the vicinity of the W Mo alloy source in the process of double glow discharge plasma surface alloying was diagnosed using the moveable Langmuir probe. The sputtering law, surface composition and morphological variation of the W Mo alloy source was studied. The experimental results show that there exists obvious preferential sputtering on the surface of the W Mo alloy source under the argon ion bombardment; the stable period is reached after a transitional period, and the preferential sputtering occurs in a definite range of composition(mole fraction): 70%～75% Mo, 22%～25% W; there appears segregation on the surface of the W Mo alloy source.
