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晶圆干燥缺陷的机理与控制 被引量:1
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作者 G.W.Gale H.Ohno +3 位作者 H.Namba T.Orii y.takagi M.Yamasaka 《电子工业专用设备》 2005年第7期29-33,共5页
长期以来,人们对于硅片在经过HF湿法处理之后出现的水印早已有所认识,尤其是图形包含亲水和疏水层时最为明显。我们系统地研究了经过HF后道处理之缺陷形成的机理,并确认了与先前报道的水印截然不同的缺陷类型。根据X射线和其它分析表明... 长期以来,人们对于硅片在经过HF湿法处理之后出现的水印早已有所认识,尤其是图形包含亲水和疏水层时最为明显。我们系统地研究了经过HF后道处理之缺陷形成的机理,并确认了与先前报道的水印截然不同的缺陷类型。根据X射线和其它分析表明,认为这些缺陷与周围环境残余的汽相HF和随后的晶圆表面反应有关。根据反应腔室HF浓度的不同可以产生不同类型的缺陷。由于水印是由硅在水中的氧化和随后产生的氧化物的分解形成的,少量的HF具有加速这个过程的效果。形成不同缺陷的条件,还有避免这些缺陷的策略均得以认定。正确的排空管理是一个关键的因素。最后发现,重参杂的硅更易产生缺陷。 展开更多
关键词 表面缺陷 水印 机理分析 缺陷控制
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Features of Boiling on an Artificial Surface—Bubble Formation, Wall Temperature Fluctuation and Nucleation Site Interaction 被引量:1
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作者 M.Shoji R.Mosdorf +3 位作者 L.Zhang y.takagi K.Yasui M.Yokota 《Journal of Thermal Science》 SCIE EI CAS CSCD 2002年第3期226-234,共9页
The artificial surfaces are applied to study the pool boiling features, including the bubble behaviors, the surface temperature fluctuation, the heat transfer characteristics and nucleate site interaction. Three sets ... The artificial surfaces are applied to study the pool boiling features, including the bubble behaviors, the surface temperature fluctuation, the heat transfer characteristics and nucleate site interaction. Three sets of experiments are carried out to investigate the influences of cavity shape, cavity size, cavity spacing on the boiling phenomena. Experimental results reveal that bubbling from the cylindrical as well as reentrant cavity is generally stable. The influence of cavity diameter on the bubble behaviors and the temperature fluctuation seems very weak while the effect of cavity depth cannot be neglected. As for the two cavity conditions, the bubble behaviors show the different features depending on the dimensionless cavity spacing. Three significant factors (thermal interaction, hydraulic interaction, bubble coalescence) control the nucleation site interaction, and the competition and dominance of the factors yield four interaction regimes. 展开更多
关键词 POOL BOILING artificial SURFACE BOILING chaos NUCLEATION site interaction.
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assessment of zinc nutrition using plasma angiotensin-converting enzyme activity (ace)in patients receiveng parenteral nutrition
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作者 R.Nezu H.Kobayashi +1 位作者 y.takagi A.Okada 《中华临床营养杂志》 CAS 1994年第4期49-49,共1页
Despite our recognition for biological role and es-sentiality of zinc (Zn)in human nutrtion,clinical as-sessment of Zn status remains highly problematic.Recent animal studies showed the change in plasmaACE (one of ... Despite our recognition for biological role and es-sentiality of zinc (Zn)in human nutrtion,clinical as-sessment of Zn status remains highly problematic.Recent animal studies showed the change in plasmaACE (one of the Zn-enzymes) with addition of Zn invitro was greater corresponding to the feeding periodof Zn deficient diet.In this study,we examinedwhether ACE ratio (increase with Zn/basal Ace)could be a sensitive parameter of Zn nutrition in hu-mans as well.ACE ratio was determined by the in-crement of ACE when added 450μmol/L of ZnSO4.4H<sub>2</sub>O to equivalent amount of plasma.which mightbe the optimal concentration in our preliminary study.In adult patients with intestinal failure receiving homeparenteral nutrition(HPN;100~220μmol/day of Znwas administered) (short bowel syndrome;3, 展开更多
关键词 NUTRITION PARENTERAL CONVERTING PROBLEMATIC preliminary invitro BASAL feeding DEFICIENT receiving
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