This article gives a brief introduction to manufacturers and markets of sputtering targets as well as the manufacturing technology thereof. Then, it analyzes the application of high-purity gold sputtering targets in t...This article gives a brief introduction to manufacturers and markets of sputtering targets as well as the manufacturing technology thereof. Then, it analyzes the application of high-purity gold sputtering targets in the fields of integrated circuit, information storage, flat panel display, etc. Based on the above, the article analyzes the processing development trend for the high-purity gold sputtering targets in aspects of ultra-high purity, manufacturing technology, analysis and testing technologies.展开更多
Two kinds of high pure silver materials with 5.3 ppm oxygen and 32.7 ppm oxygen were prepared by various melting processes, both samples were subjected to accumulative rolling with 95% thickness reduction. Their mecha...Two kinds of high pure silver materials with 5.3 ppm oxygen and 32.7 ppm oxygen were prepared by various melting processes, both samples were subjected to accumulative rolling with 95% thickness reduction. Their mechanical properties were tested during long natural aging. Results showed that the Ag sheet with 5.3 ppm oxygen is at full annealed state when natural aging 58 days or kept at 150℃ for 30 minutes, and the Ag sheet with 32.7 ppm oxygen is a little of recovery when natural aging a year. It is suggested that appropriate oxygen interstitial solute in Ag solid solution and a few of Ag2O particles at Ag grain boundaries impede the recovery and recrystallization of Ag sheets.展开更多
基金National key technology support program(2012BAE06B05)
文摘This article gives a brief introduction to manufacturers and markets of sputtering targets as well as the manufacturing technology thereof. Then, it analyzes the application of high-purity gold sputtering targets in the fields of integrated circuit, information storage, flat panel display, etc. Based on the above, the article analyzes the processing development trend for the high-purity gold sputtering targets in aspects of ultra-high purity, manufacturing technology, analysis and testing technologies.
文摘Two kinds of high pure silver materials with 5.3 ppm oxygen and 32.7 ppm oxygen were prepared by various melting processes, both samples were subjected to accumulative rolling with 95% thickness reduction. Their mechanical properties were tested during long natural aging. Results showed that the Ag sheet with 5.3 ppm oxygen is at full annealed state when natural aging 58 days or kept at 150℃ for 30 minutes, and the Ag sheet with 32.7 ppm oxygen is a little of recovery when natural aging a year. It is suggested that appropriate oxygen interstitial solute in Ag solid solution and a few of Ag2O particles at Ag grain boundaries impede the recovery and recrystallization of Ag sheets.
