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基于化学发光法的高纯气体中ppb量级NO_(x)浓度测量 被引量:2
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作者 张猛 彭志敏 +2 位作者 杨乾锁 丁艳军 杜艳君 《物理学报》 SCIE EI CAS CSCD 北大核心 2022年第13期368-376,共9页
高纯气体在半导体器件制作及燃料电池等行业应用广泛,但其杂质气体直接对加工精度及效果产生显著影响,因此对关键痕量杂质气体进行浓度诊断尤为必要.本文基于化学发光光谱理论和氮氧化物催化转化机理,设计了一套痕量NO/NO_(x)同步高精... 高纯气体在半导体器件制作及燃料电池等行业应用广泛,但其杂质气体直接对加工精度及效果产生显著影响,因此对关键痕量杂质气体进行浓度诊断尤为必要.本文基于化学发光光谱理论和氮氧化物催化转化机理,设计了一套痕量NO/NO_(x)同步高精度测量系统,通过标定实验可知,该测量系统具有高线性度(R^(2)=0.99967)、高灵敏度、低检测下限(约25 ppt,1 ppt=10^(–12))、易操作性等优势;同时,综合考虑不同背景气体对荧光、磷光的淬灭效应,建立不同高纯气体中NO_(x)测量方法,并利用该探测系统对实验室常用4种高纯气体(Ar,O_(2),CO_(2),N_(2))中ppb量级的氮氧化物进行测量,结果表示CO_(2)中的NO含量最高,约为9 ppb(1 ppb=10^(–9)),其他高纯气体中的NO含量较低,仅有0—4 ppb,4种高纯气体的NO_(2)含量均较低(<6 ppb);最后结合气体制备及提纯方式对高纯气体中杂质NO_(x)含量进行评价及分析,旨在为燃料电池、半导体器件制备等尖端科技领域提供可靠的杂质气体成分诊断方法和数据基础. 展开更多
关键词 化学发光 高纯气体 痕量气体 淬灭
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Determination of Temperatures Using CH Radical Emission Spectroscopy
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作者 yang qian-suo SONG Jun-Hao ZHU Nai-Yi 《Chinese Physics Letters》 SCIE CAS CSCD 2012年第10期134-137,共4页
An improved Boltzmann plot method where the intensity is taken as the integral of the experimental spectrum within a special band for a cluster of a rotational line of R and Q branches is proposed.This method aims at ... An improved Boltzmann plot method where the intensity is taken as the integral of the experimental spectrum within a special band for a cluster of a rotational line of R and Q branches is proposed.This method aims at deducing rotational and vibrational temperatures using CH radical A^(2)Δ→X^(2)Πband emission spectroscopy accurately.In addition,the data relative to the rotation lines of CH(A^(2)Δ→X^(2)Π)for both temperatures are assembled.The emission spectrum of CH(A^(2)Δ→X^(2)Π)at the inner cone of an acetylene-oxygen flame in a rich oxygen state is recorded and both of the temperatures are determined by the above-mentioned method.The values are recorded as 3141 K and 3097 K,for the rotational and vibrational temperatures,respectively.This result reveals that the equilibrium between the rotation and vibration states is achieved.A simple discussion for this method is also provided. 展开更多
关键词 METHOD ROTATIONAL ROTATION
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Spectral Characteristics of CN Radical(B→X)and Its Application in Determination of Rotational and Vibrational Temperatures of Plasma
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作者 PENG Zhi-Min DING Yan-Jun +2 位作者 ZHAI Xiao-Doug yang qian-suo JIANG Zong-Lin 《Chinese Physics Letters》 SCIE CAS CSCD 2011年第4期137-140,共4页
The aim is to resolve the difficulties of measurement of temperature at several thousands of Celsius degrees for some unstable non-equilibrium gas flows.Based on the molecular spectroscopy theory and inherent molecula... The aim is to resolve the difficulties of measurement of temperature at several thousands of Celsius degrees for some unstable non-equilibrium gas flows.Based on the molecular spectroscopy theory and inherent molecular structure characteristics of the CN radical,the dependence of the spectral profile on the rotational temperature(RT),vibrational temperature(VT)and optical apparatus function are numerically explored within some certain ranges.Meanwhile,by comparing the numerically calculated spectra with the experimental spectra of the CN radical,the corresponding RT and VT of the plasma induced by the interaction of the laser pulse from an oscillated Nd:YAG laser with the coal target are determined,respectively.In addition,a short discussion on the thermodynamic state and the energy transfer process of the CN radical is also given. 展开更多
关键词 ND:YAG UNSTABLE apparatus
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Alternating Linear Polarization State in a Neodymium-Doped Fiber Laser with Modulated Pump
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作者 yang qian-suo WANG Peng-ye +1 位作者 DAI Jian-hua ZHANG Hong-jun 《Chinese Physics Letters》 SCIE CAS CSCD 1997年第11期834-837,共4页
we present an analysis for the alternating linear polarization(ALP)state in a multi-longitudinal-mode laser with external modulation,and propose a new method for detecting this state.In a neodymium-doped fiber laser w... we present an analysis for the alternating linear polarization(ALP)state in a multi-longitudinal-mode laser with external modulation,and propose a new method for detecting this state.In a neodymium-doped fiber laser with a modulated pump,the ALP state is experimentally observed at both periodic and chaotic oscillation. 展开更多
关键词 POLARIZATION PUMP fiber
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