An electron cyclotron resonance assisted plasma with N2 being the plasma source gas was employed to deposit hexagonal GaN on(0001)surface ofα-Al_(2)O_(3) substrate.By special gas distributor,trimethgallium was introd...An electron cyclotron resonance assisted plasma with N2 being the plasma source gas was employed to deposit hexagonal GaN on(0001)surface ofα-Al_(2)O_(3) substrate.By special gas distributor,trimethgallium was introduced into reactant zone.A 10×10mm uniform GaN film was gained with relatively low deposition temperature,560°C,and high growth rate of 1.4μm/h.A good crystal microstructure was confirmed by its spectrum with full width at half maximum of 15 arcmin.展开更多
Two hysteresis loops and tristable states in an electron cyclotron resonance plasma system have been observed and oscillatory waveforms and their power spectra in different stable state are described in this paper.As ...Two hysteresis loops and tristable states in an electron cyclotron resonance plasma system have been observed and oscillatory waveforms and their power spectra in different stable state are described in this paper.As the microwave power was increased,the oscillation with original fundamental frequency gradually transferred to harmonic frequencies and then sudden jumped to a regular oscillation with single fourth harmonic frequency.展开更多
文摘An electron cyclotron resonance assisted plasma with N2 being the plasma source gas was employed to deposit hexagonal GaN on(0001)surface ofα-Al_(2)O_(3) substrate.By special gas distributor,trimethgallium was introduced into reactant zone.A 10×10mm uniform GaN film was gained with relatively low deposition temperature,560°C,and high growth rate of 1.4μm/h.A good crystal microstructure was confirmed by its spectrum with full width at half maximum of 15 arcmin.
文摘Two hysteresis loops and tristable states in an electron cyclotron resonance plasma system have been observed and oscillatory waveforms and their power spectra in different stable state are described in this paper.As the microwave power was increased,the oscillation with original fundamental frequency gradually transferred to harmonic frequencies and then sudden jumped to a regular oscillation with single fourth harmonic frequency.
