Films formed with nanosized nickel particles on teflon surface were prepared by means of catalyst enhanced chemical vapor deposition （CECVD） with Ni（dmg）2, Ni（acac）2, Ni（hfac）2, Ni（TMHD）2, and Ni（cp）2 as p...Films formed with nanosized nickel particles on teflon surface were prepared by means of catalyst enhanced chemical vapor deposition （CECVD） with Ni（dmg）2, Ni（acac）2, Ni（hfac）2, Ni（TMHD）2, and Ni（cp）2 as precursors, and complexes Pd（hfac）2, PdC12 and Pd（η^3-2-methylallyl）acac as catalyst under cartier gas （H2）. The film growth rate depends on the precursors and substrate temperature. The chemical value, purity and surface morphology of the Ni particle films were characterized by X-ray photoelectron spectroscopy （XPS） and scanning electron microscopy （SEM）. The films obtained were shiny with silvery color, and consisted of grains with a particle size of 50-140 nm. The Ni was metallic of which the purity was about 90%-95% from XPS analysis. SEM micrograph showed that the film had good morphology.展开更多
基金Supported by the National Natural Science Foundation ofChina (40172018, 20275011)
文摘Films formed with nanosized nickel particles on teflon surface were prepared by means of catalyst enhanced chemical vapor deposition （CECVD） with Ni（dmg）2, Ni（acac）2, Ni（hfac）2, Ni（TMHD）2, and Ni（cp）2 as precursors, and complexes Pd（hfac）2, PdC12 and Pd（η^3-2-methylallyl）acac as catalyst under cartier gas （H2）. The film growth rate depends on the precursors and substrate temperature. The chemical value, purity and surface morphology of the Ni particle films were characterized by X-ray photoelectron spectroscopy （XPS） and scanning electron microscopy （SEM）. The films obtained were shiny with silvery color, and consisted of grains with a particle size of 50-140 nm. The Ni was metallic of which the purity was about 90%-95% from XPS analysis. SEM micrograph showed that the film had good morphology.
