The(001)oriented yttria-stabilized zirconia(YSZ)Hlms with in-plane biaxial texture have been deposited on Si(111)substrates by ion beam assisted deposition at ambient temperature.The effects of ion/atom arrival rate f...The(001)oriented yttria-stabilized zirconia(YSZ)Hlms with in-plane biaxial texture have been deposited on Si(111)substrates by ion beam assisted deposition at ambient temperature.The effects of ion/atom arrival rate fatio(R=(Ar^(+)+O2^(+))/ZrO_(2))and incident angle of bombarding ion beam on the Him texture development were investigated.It was found that the in-plane biaxial texture of the films was improved gradually with increasing ion/atom arrival rate ratio R up to a critical value 1,9,but it was degraded with the further increase of R.The optimal in-plane biaxial texture,whose full width at half maximum of the(111)4>-scan spectrum is 14°,can be obtained at R=1.9 and incident angle of 55°.For a fixed R,the optimal crystallinity and in-plane biaxial alignment of the YSZ Hlms did not appear at the same incident angle and showed an opposite variation with the change of the incident angle from 51°to 55°.C-axis alignment(perpendicular to substrate surface)does not show any substantial variation with the change of incident angle within the range of 47°-56°.展开更多
C ions of three different energies were sequentially implanted into SiO_(2) films grown by plasma enhanced chemical vapor deposition.Microstructures of the samples were studied with transmission electron microscopy(TE...C ions of three different energies were sequentially implanted into SiO_(2) films grown by plasma enhanced chemical vapor deposition.Microstructures of the samples were studied with transmission electron microscopy(TEM)and secondary ion mass spectroscopy As revealed by cross-sectional TEM,porous structures had been created in the implanted region during ion implantation.No photoluminescence(PL)was detected from the as-implanted samples.However,intense short-wavelength PL peaking at 360-370nm and ~450nm was observed from the annealed samples.The blue light from samples excited by an Xe lamp can be observed by naked eyes at room temperature.The light emission mechanisms are briefly discussed.展开更多
基金Supported by the National Natural Science Foundation of China under Grant No.19875073.
文摘The(001)oriented yttria-stabilized zirconia(YSZ)Hlms with in-plane biaxial texture have been deposited on Si(111)substrates by ion beam assisted deposition at ambient temperature.The effects of ion/atom arrival rate fatio(R=(Ar^(+)+O2^(+))/ZrO_(2))and incident angle of bombarding ion beam on the Him texture development were investigated.It was found that the in-plane biaxial texture of the films was improved gradually with increasing ion/atom arrival rate ratio R up to a critical value 1,9,but it was degraded with the further increase of R.The optimal in-plane biaxial texture,whose full width at half maximum of the(111)4>-scan spectrum is 14°,can be obtained at R=1.9 and incident angle of 55°.For a fixed R,the optimal crystallinity and in-plane biaxial alignment of the YSZ Hlms did not appear at the same incident angle and showed an opposite variation with the change of the incident angle from 51°to 55°.C-axis alignment(perpendicular to substrate surface)does not show any substantial variation with the change of incident angle within the range of 47°-56°.
基金Supported by the National Natural Science Foundation of China under Grant No.69876043.
文摘C ions of three different energies were sequentially implanted into SiO_(2) films grown by plasma enhanced chemical vapor deposition.Microstructures of the samples were studied with transmission electron microscopy(TEM)and secondary ion mass spectroscopy As revealed by cross-sectional TEM,porous structures had been created in the implanted region during ion implantation.No photoluminescence(PL)was detected from the as-implanted samples.However,intense short-wavelength PL peaking at 360-370nm and ~450nm was observed from the annealed samples.The blue light from samples excited by an Xe lamp can be observed by naked eyes at room temperature.The light emission mechanisms are briefly discussed.
