The instability of p-channel low-temperature polycrystalline silicon thin film transistors(poly-Si TFTs)is investigated under negative gate bias stress(NBS)in this work.Firstly,a series of negative bias stress experim...The instability of p-channel low-temperature polycrystalline silicon thin film transistors(poly-Si TFTs)is investigated under negative gate bias stress(NBS)in this work.Firstly,a series of negative bias stress experiments is performed,the significant degradation behaviors in current-voltage characteristics are observed.As the stress voltage decreases from-25 V to-37 V,the threshold voltage and the sub-threshold swing each show a continuous shift,which is induced by gate oxide trapped charges or interface state.Furthermore,low frequency noise(LFN)values in poly-Si TFTs are measured before and after negative bias stress.The flat-band voltage spectral density is extracted,and the trap concentration located near the Si/SiO2 interface is also calculated.Finally,the degradation mechanism is discussed based on the current-voltage and LFN results in poly-Si TFTs under NBS,finding out that Si-OH bonds may be broken and form Si*and negative charge OH-under negative bias stress,which is demonstrated by the proposed negative charge generation model.展开更多
The instabilities of indium–zinc oxide thin film transistors under bias and/or illumination stress are studied in this paper. Firstly, illumination experiments are performed, which indicates the variations of current...The instabilities of indium–zinc oxide thin film transistors under bias and/or illumination stress are studied in this paper. Firstly, illumination experiments are performed, which indicates the variations of current–voltage characteristics and electrical parameters(such as threshold voltage and sub-threshold swing) are dominated by the stress-induced ionized oxygen vacancies and acceptor-like states. The dependence of degradation on light wavelength is also investigated. More negative shift of threshold voltage and greater sub-threshold swing are observed with the decrease of light wavelength.Subsequently, a negative bias illumination stress experiment is carried out. The degradation of the device is aggravated due to the decrease of recombination effects between ionized oxygen vacancies and free carriers. Moreover, the contributions of ionized oxygen vacancies and acceptor-like states are separated by using the mid-gap method. In addition, ionized oxygen vacancies are partially recombined at room temperature and fully recombined at high temperature. Finally, low-frequency noise is measured before and after negative bias illumination stress. Experimental results show few variations of the oxide trapped charges are generated during stress, which is consistent with the proposed mechanism.展开更多
The transfer characteristics of amorphous indium-zinc-oxide thin film transistors are measured in the temperature range of 10-400K. The variation of electrical parameters (threshold voltage, field effect mobility, su...The transfer characteristics of amorphous indium-zinc-oxide thin film transistors are measured in the temperature range of 10-400K. The variation of electrical parameters (threshold voltage, field effect mobility, sub-threshold swing, and leafage current) with decreasing temperature are then extracted and analyzed. Moreover, the dom- inated carrier transport mechanisms at different temperature regions are investigated. The experimental data show that the carrier transport mechanism may change from trap-limited conduction to variable range hopping conduction at lower temperature. Moreover, the field effect mobilities are also extracted and simulated at various temperatures.展开更多
Low-frequency noise(LFN) in all operation regions of amorphous indium zinc oxide(a-IZO) thin film transistors(TFTs) with an aluminum oxide gate insulator is investigated. Based on the LFN measured results, we ex...Low-frequency noise(LFN) in all operation regions of amorphous indium zinc oxide(a-IZO) thin film transistors(TFTs) with an aluminum oxide gate insulator is investigated. Based on the LFN measured results, we extract the distribution of localized states in the band gap and the spatial distribution of border traps in the gate dielectric,and study the dependence of measured noise on the characteristic temperature of localized states for a-IZO TFTs with Al2 O3 gate dielectric. Further study on the LFN measured results shows that the gate voltage dependent noise data closely obey the mobility fluctuation model, and the average Hooge's parameter is about 1.18×10^-3.Considering the relationship between the free carrier number and the field effect mobility, we simulate the LFN using the △N-△μ model, and the total trap density near the IZO/oxide interface is about 1.23×10^18 cm^-3eV^-1.展开更多
基金Project supported by the National Natural Science Foundation of China(Grant No.61574048)the Pearl River Science and Technology Nova Program of Guangzhou City,China(Grant No.201710010172)+2 种基金the International Science and Technology Cooperation Program of Guangzhou City(Grant No.201807010006)the International Cooperation Program of Guangdong Province,China(Grant No.2018A050506044)the Opening Fund of Key Laboratory of Silicon Device Technology,China(Grant No.KLSDTJJ2018-6)
文摘The instability of p-channel low-temperature polycrystalline silicon thin film transistors(poly-Si TFTs)is investigated under negative gate bias stress(NBS)in this work.Firstly,a series of negative bias stress experiments is performed,the significant degradation behaviors in current-voltage characteristics are observed.As the stress voltage decreases from-25 V to-37 V,the threshold voltage and the sub-threshold swing each show a continuous shift,which is induced by gate oxide trapped charges or interface state.Furthermore,low frequency noise(LFN)values in poly-Si TFTs are measured before and after negative bias stress.The flat-band voltage spectral density is extracted,and the trap concentration located near the Si/SiO2 interface is also calculated.Finally,the degradation mechanism is discussed based on the current-voltage and LFN results in poly-Si TFTs under NBS,finding out that Si-OH bonds may be broken and form Si*and negative charge OH-under negative bias stress,which is demonstrated by the proposed negative charge generation model.
基金supported by the Opening Fund of Key Laboratory of Silicon Device Technology,Chinese Academy of Sciences(Grant No.KLSDTJJ2018-6)the National Natural Science Foundation of China(Grant No.61574048)+1 种基金the Science and Technology Research Project of Guangdong Province,China(Grant No.2015B090912002)the Pearl River S&T Nova Program of Guangzhou City,China(Grant No.201710010172)
文摘The instabilities of indium–zinc oxide thin film transistors under bias and/or illumination stress are studied in this paper. Firstly, illumination experiments are performed, which indicates the variations of current–voltage characteristics and electrical parameters(such as threshold voltage and sub-threshold swing) are dominated by the stress-induced ionized oxygen vacancies and acceptor-like states. The dependence of degradation on light wavelength is also investigated. More negative shift of threshold voltage and greater sub-threshold swing are observed with the decrease of light wavelength.Subsequently, a negative bias illumination stress experiment is carried out. The degradation of the device is aggravated due to the decrease of recombination effects between ionized oxygen vacancies and free carriers. Moreover, the contributions of ionized oxygen vacancies and acceptor-like states are separated by using the mid-gap method. In addition, ionized oxygen vacancies are partially recombined at room temperature and fully recombined at high temperature. Finally, low-frequency noise is measured before and after negative bias illumination stress. Experimental results show few variations of the oxide trapped charges are generated during stress, which is consistent with the proposed mechanism.
基金Supported by the National Natural Science Foundation of China under Grant No 61574048the Pearl River S&T Nova Program of Guangzhou under Grant No 201710010172+1 种基金the International Science and Technology Cooperation Program of Guangzhou under Grant No 201807010006the Opening Fund of Key Laboratory of Silicon Device Technology under Grant No KLSDTJJ2018-6
文摘The transfer characteristics of amorphous indium-zinc-oxide thin film transistors are measured in the temperature range of 10-400K. The variation of electrical parameters (threshold voltage, field effect mobility, sub-threshold swing, and leafage current) with decreasing temperature are then extracted and analyzed. Moreover, the dom- inated carrier transport mechanisms at different temperature regions are investigated. The experimental data show that the carrier transport mechanism may change from trap-limited conduction to variable range hopping conduction at lower temperature. Moreover, the field effect mobilities are also extracted and simulated at various temperatures.
基金Supported by the National Natural Science Foundation of China under Grant No 61574048the Science and Technology Research Project of Guangdong Province under Grant Nos 2015B090912002 and 2015B090901048the Pearl River S&T Nova Program of Guangzhou under Grant No 201710010172
文摘Low-frequency noise(LFN) in all operation regions of amorphous indium zinc oxide(a-IZO) thin film transistors(TFTs) with an aluminum oxide gate insulator is investigated. Based on the LFN measured results, we extract the distribution of localized states in the band gap and the spatial distribution of border traps in the gate dielectric,and study the dependence of measured noise on the characteristic temperature of localized states for a-IZO TFTs with Al2 O3 gate dielectric. Further study on the LFN measured results shows that the gate voltage dependent noise data closely obey the mobility fluctuation model, and the average Hooge's parameter is about 1.18×10^-3.Considering the relationship between the free carrier number and the field effect mobility, we simulate the LFN using the △N-△μ model, and the total trap density near the IZO/oxide interface is about 1.23×10^18 cm^-3eV^-1.