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Roll-to-roll fabrication of large-scale polyorgansiloxane thin film with high flexibility and ultra-efficient atomic oxygen resistance 被引量:1
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作者 Yi LI Zhonghua LI +8 位作者 Detian LI yanchun he Shengzhu CAO Hu WANG hengjiao GAO Hanjun HU Ying he Yuan WANG Jun ZHU 《Plasma Science and Technology》 SCIE EI CAS CSCD 2022年第6期173-181,共9页
One of the most widely used and well-established atomic oxygen(AO)protection solutions for low Earth orbit(LEO)satellites is the deposition of protective coatings on polymeric materials.However,manufacturing extensive... One of the most widely used and well-established atomic oxygen(AO)protection solutions for low Earth orbit(LEO)satellites is the deposition of protective coatings on polymeric materials.However,manufacturing extensive expanses of these coating materials with good transparency,flexibility,smoothness,ultra-thinness,and exceptional AO resistance remains a critical issue.Herein,we successfully deposited a 400 nm thick polyorgansiloxane(SiO_(x)C_(y)H_(z))coating with high optical transparency and uniform good adherence on to a 1.2 m wide polyimide surface,by optimizing the distribution of hexamethyldisiloxane and oxygen as precursors in the roll-to-roll compatible plasmaenhanced chemical vapor deposition process.After AO irradiation with the fluence of 7.9×10^(20)atoms·cm^(–2),the erosion yield of the SiO_(x)C_(y)H_(z)-coated Kapton was less than 2.30×10^(–26)cm^3·atom^(–1),which was less than 0.77%of that of the Kapton.It indicates that the SiO_(x)C_(y)H_(z)coating can well prevent the erosion of Kapton by AO.In addition,it was also clarified that a SiO_(2) passivation layer was formed on the surface of the SiO_(x)C_(y)H_(z)coating during AO irradiation,which exhibited a‘self-reinforcing’defense mechanism.The entire preparation process of the SiO_(x)C_(y)H_(z)coating was highly efficient and low-cost,and it has shown great potential for applications in LEO. 展开更多
关键词 plasma-enhanced chemical vapor deposition HEXAMETHYLDISILOXANE polyorganosiloxane thin film FLEXIBILITY atomic oxygen
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Optical and Irradiation-Resistant Properties of ITO Films on F46 and PI Substrates
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作者 Chao Zhou Hui Zhou +4 位作者 yanchun he Miao Yang Yuqing Xiong Lingmao Xu Yi Wang 《Transactions of Tianjin University》 EI CAS 2019年第2期195-200,共6页
This study investigated indium tin oxide(ITO) films that were deposited on fluororesin-46(F46) and polyimide(PI) transparent flexible substrates by a DC magnetron sputtering system. The optical properties of ITO films... This study investigated indium tin oxide(ITO) films that were deposited on fluororesin-46(F46) and polyimide(PI) transparent flexible substrates by a DC magnetron sputtering system. The optical properties of ITO films on F46 and PI including transmittance and reflectance in visible, near-infrared, and infrared spectral regions were obtained, and the surface morphology, and optical and electrical properties of ITO/F46 and ITO/PI after vacuum ultraviolet irradiation were investigated. The results showed that the mean transmittances of ITO/F46 and ITO/PI decreased and the sheet resistance increased after the irradiation, and these effects were mainly attributed to the greater surface roughness and crystal defects caused by the irradiation. 展开更多
关键词 Indiumtin oxide TRANSPARENT flexible SUBSTRATES OPTICAL properties Vacuum ULTRAVIOLET irradiation-resistant property
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