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芯片金属互连中电镀添加剂的理论与实验研究
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作者 李亚强 李若鹏 +5 位作者 江杰 杨培霞 张锦秋 刘安敏 Peter Broekmann 安茂忠 《中国科学:化学》 CAS CSCD 北大核心 2023年第10期1970-1988,共19页
电镀技术是实现芯片制程中金属互连的核心技术,而电镀所用添加剂是实现高质量互连的关键.本文系统地概述了电镀互连中添加剂的研究方法.首先对添加剂的电化学研究方法进行介绍,将电化学研究法分为伏安与阻抗分析法、恒电流研究法和其他... 电镀技术是实现芯片制程中金属互连的核心技术,而电镀所用添加剂是实现高质量互连的关键.本文系统地概述了电镀互连中添加剂的研究方法.首先对添加剂的电化学研究方法进行介绍,将电化学研究法分为伏安与阻抗分析法、恒电流研究法和其他电化学方法三类,并对电化学方法的应用和缺点进行总结.随后,从分子动力学模拟和量子化学计算两方面介绍了理论计算在添加剂研究中的应用.最后,介绍了各种先进表征技术在研究添加剂机理方面的应用.从波谱分析方法、电子显微镜研究方法和二次离子质谱研究方法三个方面介绍了先进表征方法在研究添加剂作用机理的应用.总结添加剂研究的不同方法为后续开展添加剂的筛选及作用机理的研究提供指导. 展开更多
关键词 芯片互连 添加剂 电化学方法 理论计算 先进表征
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Elucidating the role of P on Mn-and N-doped graphene catalysts in promoting oxygen reduction:Density functional theory studies
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作者 yaqiang li Penghui Ren +7 位作者 Xiangyu Lu Jinqiu Zhang Peixia Yang Xiaoxuan Yang Guangzhao Wang Anmin liu Gang Wu Maozhong An 《SusMat》 2023年第3期390-401,共12页
The non-noble Mn coordinated N,P co-doping graphene materials were investigated theoretically in this work based on density functional theory calculation.The electronic structure is effectively tuned after the introdu... The non-noble Mn coordinated N,P co-doping graphene materials were investigated theoretically in this work based on density functional theory calculation.The electronic structure is effectively tuned after the introduction of P heteroatom.The moderate d band center and density of states at Fermi energy of MnN_(4)-P1-G indicate that it is ofmodest adsorption ability for these O-containing intermediates.The rank of adsorption energies ofO-containing intermediates for MnN_(4)-P1-G is OH*>2OH*>OOH*>O*>O2*>H2O*,whereas the MnN_(4)-P1-G favors a four-electron process instead of two-electron process.The doping of P on MnN_(4)-P1-G can increase the kinetic activity for the rate-determining step as well as the Ulim for MnN_(4)-P1-G significantly increases from 0.38 to 0.45 V compared with MnN_(4)-G.The spin density and magnetic moments of Mn are effectively tuned by d,p hybridization to lower the adsorption energy ofOHintermediates(rate-determining step[RDS])so as to improve the catalytic activity.It is concluded that the P-doped MnN_(4)catalysts with excellent oxygen reduction reaction activity can be obtained and this study can provide theoretical guidance for the rational design of high-performanceMn-based carbonmaterials catalysts. 展开更多
关键词 MnN_(4)graphene oxygen reduction reaction P doping
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